In situ fast ellipsometric analysis of repetitive surface phenomena

Review of Scientific Instruments

Volumn 68, Issue 8, 1997, Pages 3135-3139

  Costa, J ^a,b   Campmany, J ^a,c   Canillas, A ^a   Andujar J L ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITY OF GIRONA   (Spain)

^c UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347228373     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148257     Document Type: Article

References (15)

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