Simultaneous determination of reflectance spectra along with {ψ(E), Δ(E)} in multichannel ellipsometry: Applications to instrument calibration and reduction of real-time data

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 79-84

  An, Ilsin ^a   Lee, Joungchel ^b   Hong, Byungyou ^b   Collins, R W ^b  

^a Hanyang University   (South Korea)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Real time spectroscopic ellipsometry (SE); Real time spectroscopic reflectance; Real time three parameter SE; SE calibration; Silver film growth

Indexed keywords

CALIBRATION; DATA ACQUISITION; DATA REDUCTION; FILM GROWTH; LIGHT REFLECTION; MAGNETRON SPUTTERING; METALLIC FILMS; NUCLEATION; SILVER; SPECTROSCOPY; THIN FILMS;

ROTATING POLARIZER MULTICHANNEL ELLIPSOMETERS;

ELLIPSOMETRY;

EID: 0032000271     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00774-8     Document Type: Article

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