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Volumn 313-314, Issue , 1998, Pages 469-473

Real time spectroscopic ellipsometry for characterization and optimization of amorphous silicon-based solar cell structures

(5) Koh, Joohyun a Fujiwara, H a Lu, Yiwei a Wronski, C R b Collins, R W a

a PENNSYLVANIA STATE UNIVERSITY (United States)

b The Pennsylvania State University (United States)

Author keywords

Hydrogenated amorphous silicon (a Si:H) based solar cells; Microcrystalline silicon ( c Si:H); Real time spectroscopic ellipsometry (RTSE); Si nanocrystallites

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; FILM GROWTH; HYDROGENATION; LOW TEMPERATURE EFFECTS; NANOSTRUCTURED MATERIALS; NUCLEATION; OPTIMIZATION; PARTICLE SIZE ANALYSIS; SPECTROSCOPIC ANALYSIS; SUBSTRATES;

AMORPHOUS SILICON BASED SOLAR CELL STRUCTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD); REAL TIME SPECTROSCOPIC ELLIPSOMETRY (RTSE);

SOLAR CELLS;

EID: 0031998572 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00866-3 Document Type: Article

Times cited : (27)

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