Characterization of AlxGa1-xAs/GaAs heterojunction bipolar transistor structures using cross-sectional scanning force microscopy

Journal of Applied Physics

Volumn 87, Issue 4, 2000, Pages 1937-1942

  Rosenthal, P A ^a   Yu, E T ^a   Pierson, R L ^b   Zampardi, P J ^b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b ROCKWELL SCIENCE CENTER   (United States)

^c IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001440403     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372116     Document Type: Article

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