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Applied Physics Letters

Volumn 74, Issue 1, 1999, Pages 58-60

Real-time measurement of the evolution of carrier mobility in thin-film semiconductors during growth

(4) Brenot, R a Vanderhaghen, R a Drevillon B a Roca I Cabarrocas, P a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CRYSTAL MICROSTRUCTURE; ELECTRON TRANSPORT PROPERTIES; ELLIPSOMETRY; FILM GROWTH; LASER PULSES; MICROWAVES; SEMICONDUCTING SILICON; SPECTROSCOPY; THIN FILMS;

FILM THICKNESS; MICROCRYSTALLINE SILICON; MICROWAVE MOBILITY; REAL TIME MEASUREMENT; SPECTROSCOPIC ELLIPSOMETRY; TIME RESOLVED MICROWAVE CONDUCTIVITY;

CARRIER MOBILITY;

EID: 0033521293 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.123132 Document Type: Article

Times cited : (29)

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