Long range effects of hydrogen during microcrystalline silicon growth

Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 11-14

  Hamma, S ^a   Roca I Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Hydrogen; Microcrystalline silicon; Porosity; Spectroscopic ellipsometry

Indexed keywords

COMPOSITION EFFECTS; CONDUCTIVE FILMS; CRYSTALLINE MATERIALS; DOPING (ADDITIVES); ELLIPSOMETRY; FILM GROWTH; HYDROGEN; POROSITY; SPECTROSCOPIC ANALYSIS; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

AMORPHOUS HYDROGENATED SILICON; MICROCRYSTALLINE SILICON; SPECTROSCOPIC ELLIPSOMETRY;

SILICON;

EID: 0031098312     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09386-8     Document Type: Article

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