SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 84, Issue 7, 1998, Pages 3919-3932

Growth and composition of dual-plasma polymer-like amorphous carbon films

(5) Godet, C a Heitz, T a Bouree J E a Drevillon B a Clerc, C b

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

b UNIVERSITÉ PARIS SACLAY (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000250109 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.368570 Document Type: Article

Times cited : (34)

References (50)

1
- 0010005593
- D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991).
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

2
- 0000879286
- P. J. Fallon, V. S. Veerasamy, C. A. Davis, J. Robertson, G. A. J. Amaratunga, W. I. Milne, and J. Koskinen, Phys. Rev. B 48, 4777 (1993).
- (1993) Phys. Rev. B , vol.48 , pp. 4777
- Fallon, P.J.¹ Veerasamy, V.S.² Davis, C.A.³ Robertson, J.⁴ Amaratunga, G.A.J.⁵ Milne, W.I.⁶ Koskinen, J.⁷

3
- 0001096605
- M. Chhowala, C. A. Davis, M. Weiler, B. Kleinsorge, and G. A. J. Amaratunga, J. Appl. Phys. 79, 2237 (1996).
- (1996) J. Appl. Phys. , vol.79 , pp. 2237
- Chhowala, M.¹ Davis, C.A.² Weiler, M.³ Kleinsorge, B.⁴ Amaratunga, G.A.J.⁵

4
- 0030563564
- W. I. Milne, J. Non-Cryst. Solids 198-200, 605 (1996).
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 605
- Milne, W.I.¹

5
- 0038509301
- J. Ullmann and G. Schmidt, Diamond Relat. Mater. 1, 321 (1992).
- (1992) Diamond Relat. Mater. , vol.1 , pp. 321
- Ullmann, J.¹ Schmidt, G.²

6
- 21544452592
- D. L. Pappas, K. L. Saenger, J. Burley, W. Krakow, J. J. Cuomo, T. Gu, and R. W. Collins, J. Appl. Phys. 71, 5675 (1992).
- (1992) J. Appl. Phys. , vol.71 , pp. 5675
- Pappas, D.L.¹ Saenger, K.L.² Burley, J.³ Krakow, W.⁴ Cuomo, J.J.⁵ Gu, T.⁶ Collins, R.W.⁷

7
- 11344277892
- N. Mutsukura, S. Inoue, and Y. Machi, J. Appl. Phys. 72, 43 (1992).
- (1992) J. Appl. Phys. , vol.72 , pp. 43
- Mutsukura, N.¹ Inoue, S.² Machi, Y.³

8
- 0027906995
- S. Xu, M. Hundhausen, J. Ristein, B. Yan, and L. Ley, J. Non-Cryst. Solids 164-166, 1127 (1993).
- (1993) J. Non-Cryst. Solids , vol.164-166 , pp. 1127
- Xu, S.¹ Hundhausen, M.² Ristein, J.³ Yan, B.⁴ Ley, L.⁵

9
- 0028397670
- N. Fourches and G. Turban, Thin Solid Films 240, 28 (1994).
- (1994) Thin Solid Films , vol.240 , pp. 28
- Fourches, N.¹ Turban, G.²

10
- 21544445095
- P. Reinke, W. Jacob, and W. Möller, J. Appl. Phys. 74, 1354 (1993).
- (1993) J. Appl. Phys. , vol.74 , pp. 1354
- Reinke, P.¹ Jacob, W.² Möller, W.³

11
- 85083869660
- Ph.D. thesis, Nantes University
- M. Zarrabian, Ph.D. thesis, Nantes University, 1998.
- (1998)
- Zarrabian, M.¹

12
- 17344376804
- J. E. Bourée, C. Godet, B. Drévillon, R. Etemadi, T. Heitz, J. Cernogora, and J. L. Fave, J. Non-Cryst. Solids 198-200, 623 (1996).
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 623
- Bourée, J.E.¹ Godet, C.² Drévillon, B.³ Etemadi, R.⁴ Heitz, T.⁵ Cernogora, J.⁶ Fave, J.L.⁷

13
- 3042956672
- M. Weiler, S. Sattel, T. Giessen, K. Jung, H. Erhardt, V. S. Veerasamy, and J. Robertson, Phys. Rev. B 53, 1594 (1993).
- (1993) Phys. Rev. B , vol.53 , pp. 1594
- Weiler, M.¹ Sattel, S.² Giessen, T.³ Jung, K.⁴ Erhardt, H.⁵ Veerasamy, V.S.⁶ Robertson, J.⁷

14
- 0026241953
- S. V. Chernyshov, E. I. Terukov, V. Vassilyev, and A. S. Volkov, J. Non-Cryst. Solids 134, 218 (1991).
- (1991) J. Non-Cryst. Solids , vol.134 , pp. 218
- Chernyshov, S.V.¹ Terukov, E.I.² Vassilyev, V.³ Volkov, A.S.⁴

15
- 0032068566
- J. E. Bourée, T. Heitz, C. Godet, B. Drévillon, J. P. Conde, V. Chu, M. N. Berberan-Santos, and A. Fedorov, J. Non-Cryst. Solids 227, 574 (1996).
- (1996) J. Non-Cryst. Solids , vol.227 , pp. 574
- Bourée, J.E.¹ Heitz, T.² Godet, C.³ Drévillon, B.⁴ Conde, J.P.⁵ Chu, V.⁶ Berberan-Santos, M.N.⁷ Fedorov, A.⁸

16
- 0031501483
- J. Cernogora, Phys. Status Solidi B 201, 303 (1997).
- (1997) Phys. Status Solidi B , vol.201 , pp. 303
- Cernogora, J.¹

17
- 0003575566
- World Publishing Company, Singapore
- C. Godet, Amorphous Carbon: State of the Art (World Publishing Company, Singapore, 1998).
- (1998) Amorphous Carbon: State of the Art
- Godet, C.¹

18
- 0040282525
- J. Robertson, Philos. Mag. B 76, 335 (1997).
- (1997) Philos. Mag. B , vol.76 , pp. 335
- Robertson, J.¹

19
- 0026882898
- M. Yoshimi, H. Shimizu, K. Hattori, H. Okamoto, and Y. Hamakawa, Optoelectron., Devices Technol. 7, 69 (1992).
- (1992) Optoelectron., Devices Technol. , vol.7 , pp. 69
- Yoshimi, M.¹ Shimizu, H.² Hattori, K.³ Okamoto, H.⁴ Hamakawa, Y.⁵

20
- 0000731124
- J. Robertson, Diamond Relat. Mater. 6, 212 (1997).
- (1997) Diamond Relat. Mater. , vol.6 , pp. 212
- Robertson, J.¹

21
- 17344394629
- J. Robertson, J. Non-Cryst. Solids 198-200, 615 (1996).
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 615
- Robertson, J.¹

22
- 0001550788
- J. W. A. Gielen, W. M. M. Kessels, M. C. M. van de Sanden, and D. C. Schram, J. Appl. Phys. 82, 2643 (1997).
- (1997) J. Appl. Phys. , vol.82 , pp. 2643
- Gielen, J.W.A.¹ Kessels, W.M.M.² Van De Sanden, M.C.M.³ Schram, D.C.⁴

23
- 0022810595
- Y. Catherine and P. Couderc, Thin Solid Films 144, 265 (1986).
- (1986) Thin Solid Films , vol.144 , pp. 265
- Catherine, Y.¹ Couderc, P.²

24
- 0347638373
- W. Möller, Appl. Phys. A: Solids Surf. 56, 527 (1993).
- (1993) Appl. Phys. A: Solids Surf. , vol.56 , pp. 527
- Möller, W.¹

25
- 0029293625
- W. Möller, W. Fukarek, K. Lange, A. von Keudell, and W. Jacob, Jpn. J. Appl. Phys., Part 1 34, 2163 (1995).
- (1995) Jpn. J. Appl. Phys., Part 1 , vol.34 , pp. 2163
- Möller, W.¹ Fukarek, W.² Lange, K.³ Von Keudell, A.⁴ Jacob, W.⁵

26
- 0000591011
- N. V. Mantzaris, E. Gogolides, A. G. Boudouvis, A. Rhallabi, and G. Turban, J. Appl. Phys. 79, 3718 (1996).
- (1996) J. Appl. Phys. , vol.79 , pp. 3718
- Mantzaris, N.V.¹ Gogolides, E.² Boudouvis, A.G.³ Rhallabi, A.⁴ Turban, G.⁵

27
- 0031488040
- R. Etemadi, C. Godet, J. Perrin, B. Drévillon, J. Hue, J. Y. Parey, J. C. Rostaing, and F. Coeuret, J. Vac. Sci. Technol. A 15, 320 (1997).
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 320
- Etemadi, R.¹ Godet, C.² Perrin, J.³ Drévillon, B.⁴ Hue, J.⁵ Parey, J.Y.⁶ Rostaing, J.C.⁷ Coeuret, F.⁸

28
- 0031207793
- R. Etemadi, C. Godet, and J. Perrin, Plasma Sources Sci. Technol. 6, 323 (1997).
- (1997) Plasma Sources Sci. Technol. , vol.6 , pp. 323
- Etemadi, R.¹ Godet, C.² Perrin, J.³

29
- 0004180286
- Academic, New York
- F. H. Field and J. L. Franklin, Electron Impact Phenomena and the Properties of Gaseous Ions (Academic, New York, 1970), p. 105.
- (1970) Electron Impact Phenomena and the Properties of Gaseous Ions , pp. 105
- Field, F.H.¹ Franklin, J.L.²

30
- 85083866608
- Heyden & Son, London
- A. Cornu and R. Massot, Compilation of Mass Spectra Data, Vol. 1 (Heyden & Son, London, 1975), p. 4A.
- (1975) Compilation of Mass Spectra Data , vol.1
- Cornu, A.¹ Massot, R.²

31
- 44049121700
- H. Bernas, J. Chaumont, E. Cottereau, R. Meunier, A. Traverse, C. Clerc, O. Kaitosov, F. Lalu, G. Moroy, and M. Salome, Nucl. Instrum. Methods Phys. Res. B 62, 416 (1992).
- (1992) Nucl. Instrum. Methods Phys. Res. B , vol.62 , pp. 416
- Bernas, H.¹ Chaumont, J.² Cottereau, E.³ Meunier, R.⁴ Traverse, A.⁵ Clerc, C.⁶ Kaitosov, O.⁷ Lalu, F.⁸ Moroy, G.⁹ Salome, M.¹⁰

32
- 33645392569
- L. Calcagno, G. Compagnini, and G. Fotti, Nucl. Instrum. Methods Phys. Res. B 65, 413 (1992).
- (1992) Nucl. Instrum. Methods Phys. Res. B , vol.65 , pp. 413
- Calcagno, L.¹ Compagnini, G.² Fotti, G.³

33
- 0009260463
- A. R. Forouhi and I. Bloomer, Phys. Rev. B 34, 7018 (1986).
- (1986) Phys. Rev. B , vol.34 , pp. 7018
- Forouhi, A.R.¹ Bloomer, I.²

34
- 0010257893
- S. Vallon, E. Compain, and B. Drévillon, Rev. Sci. Instrum. 66, 3269 (1995).
- (1995) Rev. Sci. Instrum. , vol.66 , pp. 3269
- Vallon, S.¹ Compain, E.² Drévillon, B.³

35
- 85083867446
- to be published
- T. Heitz, B. Drévillon, C. Godet, and J. E. Bourée, Phys. Rev. B (to be published).
- Phys. Rev. B
- Heitz, T.¹ Drévillon, B.² Godet, C.³ Bourée, J.E.⁴

36
- 0042924761
- T. Heitz, B. Drévillon, J. E. Bourée, and C. Godet, Appl. Phys. Lett. 72, 780 (1998).
- (1998) Appl. Phys. Lett. , vol.72 , pp. 780
- Heitz, T.¹ Drévillon, B.² Bourée, J.E.³ Godet, C.⁴

37
- 0032068614
- T. Heitz, B. Drévillon, J. E. Bourée, and C. Godet, J. Non-Cryst. Solids 227, 636 (1998).
- (1998) J. Non-Cryst. Solids , vol.227 , pp. 636
- Heitz, T.¹ Drévillon, B.² Bourée, J.E.³ Godet, C.⁴

38
- 0013216067
- D. R. McKenzie, L. C. Botten, and R. C. McPhedran, Phys. Rev. Lett. 51, 280 (1983).
- (1983) Phys. Rev. Lett. , vol.51 , pp. 280
- McKenzie, D.R.¹ Botten, L.C.² McPhedran, R.C.³

39
- 0000733948
- C. Jäger, J. Gottwald, H. W. Spiess, and R. J. Newport, Phys. Rev. B 50, 846 (1994).
- (1994) Phys. Rev. B , vol.50 , pp. 846
- Jäger, C.¹ Gottwald, J.² Spiess, H.W.³ Newport, R.J.⁴

40
- 84985788225
- H. Deutsch, H. Kersten, S. Klagge, and A. Rutscher, Contrib. Plasma Phys. 28, 149 (1988).
- (1988) Contrib. Plasma Phys. , vol.28 , pp. 149
- Deutsch, H.¹ Kersten, H.² Klagge, S.³ Rutscher, A.⁴

41
- 0000335922
- A. von Keudell and W. Jacob, J. Appl. Phys. 79, 1092 (1996).
- (1996) J. Appl. Phys. , vol.79 , pp. 1092
- Von Keudell, A.¹ Jacob, W.²

42
- 85083866153
- H. Sugai, H. Kojima, A. Ishida, and H. Toyoda, Appl. Phys. Lett. 19, 437 (1986).
- (1986) Appl. Phys. Lett. , vol.19 , pp. 437
- Sugai, H.¹ Kojima, H.² Ishida, A.³ Toyoda, H.⁴

43
- 85083866273
- Ph.D. thesis, University of Paris 6
- P. Kae-Nune, Ph.D. thesis, University of Paris 6, 1995.
- (1995)
- Kae-Nune, P.¹

44
- 85083869168
- Ph.D. thesis, University of Nantes
- A. Rhallabi, Ph.D. thesis, University of Nantes, 1992.
- (1992)
- Rhallabi, A.¹

45
- 0345623806
- C. P. Klages, Appl. Phys. A: Solids Surf. 56, 513 (1993).
- (1993) Appl. Phys. A: Solids Surf. , vol.56 , pp. 513
- Klages, C.P.¹

46
- 0031550950
- A. von Keudell, Nucl. Instrum. Methods Phys. Res. B 125, 323 (1997).
- (1997) Nucl. Instrum. Methods Phys. Res. B , vol.125 , pp. 323
- Von Keudell, A.¹

47
- 0000451335
- M. Weiler, S. Sattel, K. Jung, H. Erhardt, V. S. Veerasamy, and J. Robertson, Appl. Phys. Lett. 64, 2797 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2797
- Weiler, M.¹ Sattel, S.² Jung, K.³ Erhardt, H.⁴ Veerasamy, V.S.⁵ Robertson, J.⁶

48
- 30244535151
- J. Robertson and E. P. O'Reilly, Phys. Rev. B 35, 2946 (1987).
- (1987) Phys. Rev. B , vol.35 , pp. 2946
- Robertson, J.¹ O'Reilly, E.P.²

49
- 18544366860
- J. Angus and F. Jansen, J. Vac. Sci. Technol. A 6, 1778 (1988).
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 1778
- Angus, J.¹ Jansen, F.²

50
- 0242340979
- H. Hofsäss, H. Feldermann, R. Merck, M. Sebastian, and C. Ronning, Appl. Phys. A: Solids Surf. 66, 153 (1998).
- (1998) Appl. Phys. A: Solids Surf. , vol.66 , pp. 153
- Hofsäss, H.¹ Feldermann, H.² Merck, R.³ Sebastian, M.⁴ Ronning, C.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.