Photoluminescence of polymer-like amorphous carbon films grown in different plasma reactors

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 574-578

  Bouree J E ^a   Heitz, T ^a   Godet, C ^a   Drevillon B ^a   Conde, J P ^b   Chu, V ^c   Berberan Santos, M N ^b   Fedorov, A ^b  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^c INESC   (Portugal)

Author keywords

Amorphous carbon; Photoluminescence; Plasma deposition

Indexed keywords

AMORPHOUS FILMS; CHEMICAL REACTORS; EMISSION SPECTROSCOPY; FILM GROWTH; PHOTOLUMINESCENCE; PLASMA APPLICATIONS; POLYMERS;

PLASMA DEPOSITION;

CARBON;

EID: 0032068566     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00147-1     Document Type: Article

References (12)

1. J. Robertson, E.P. O'Reilly, Phys. Rev. B 35 (1987) 2946.
2. J. Robertson, J. Non-Cryst. Solids 198-200 (1996) 615.
3. F. Demichelis, S. Schreiter, A. Tagliaferro, Phys. Rev. B 51 (1995) 2143.
4. C. Jäger, J. Gottwald, H.W. Spiess, R.J. Newport, Phys. Rev. B 50 (1994) 846.
5. F. Demichelis, C.F. Pirri, A. Tagliaferro, Phys. Rev. B 45 (1992) 14364.
6. C. Sénémaud, A. Gheorghiu, P.A. Bonnefont, T. Heitz, C. Godet, J.E. Bourée, this conference.
7. R. Etemadi, C. Godet, J. Perrin, B. Drévillon, J. Hue, J.Y. Parey, J.C. Rostaing, F. Coeuret, J. Vac. Sci. Technol. A 15 (1997) 320.
8. J.P. Conde, V. Chu, F. Giorgis, C.F. Pirri, S. Arekat, Mater. Res. Soc. Symp. Proc. 467 (1997) 627.
9. V. Chu, J.P. Conde, Mater. Res. Soc. Symp. Proc. 420 (1996) 381.
10. A. Fedorov, M.N. Berberan-Santos, J.P. Lefevre, B. Valeur, Chem. Phys. Lett. 267 (1997) 467.
11. S. Xu, M. Hundhausen, J. Ristein, B. Yan, L. Ley, J. Non-Cryst. Solids 164-166 (1993) 1127.
12. J.E. Bourée, C. Godet, B. Drévillon, R. Etemadi, T. Heitz, J. Cernogora, J.L. Fave, J. Non-Cryst. Solids 198-200 (1996) 623.