Early stages of the growth of hydrogenated amorphous carbon investigated by in situ infrared ellipsometry

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 636-640

  Heitz, T ^a   Drevillon B ^a   Bouree J E ^a   Godet, C ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Amorphous carbon; Interface; Vibrational properties

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; CRYSTALLINE MATERIALS; ELLIPSOMETRY; FILM GROWTH; INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); MOLECULAR VIBRATIONS; PLASMAS; PLASTIC FILMS; SILICON; STRESS RELAXATION;

HYDROGENATED AMORPHOUS CARBON; INFRARED SPECTROSCOPIC ELLIPSOMETRY (IRSE);

CARBON;

EID: 0032068614     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00139-2     Document Type: Article

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