In situ infrared ellipsometry study of hydrogenated amorphous carbon/Si interface formation

Applied Physics Letters

Volumn 72, Issue 7, 1998, Pages 780-782

  Heitz, T ^a   Drevillon B ^a   Bouree J E ^a   Godet, C ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042924761     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120891     Document Type: Article

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