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Volumn 198-200, Issue PART 2, 1996, Pages 623-627

Optical and luminescence properties of polymer-like a-C:H films deposited in a dual-mode PECVD reactor

Author keywords

[No Author keywords available]

Indexed keywords

BUTANE; CARBON; CHEMICAL VAPOR DEPOSITION; DECOMPOSITION; DIELECTRIC PROPERTIES; ELLIPSOMETRY; ION BOMBARDMENT; LIGHT EXTINCTION; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; PLASMAS;

EID: 17344376804     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(95)00776-8     Document Type: Article
Times cited : (15)

References (14)
  • 1
    • 0022754765 scopus 로고
    • J. Robertson, Adv. Phys. 35 (1986) 317; J. Non-Cryst. Solids 164-166 (1993) 1115.
    • (1986) Adv. Phys. , vol.35 , pp. 317
    • Robertson, J.1
  • 2
    • 0027906837 scopus 로고
    • J. Robertson, Adv. Phys. 35 (1986) 317; J. Non-Cryst. Solids 164-166 (1993) 1115.
    • (1993) J. Non-cryst. Solids , vol.164-166 , pp. 1115
  • 8
    • 0029776254 scopus 로고
    • European mater. Res. Soc. (E-MRS) conf
    • Strasbourg, 22-26 May
    • I.E. Bourée, C. Godet, R. Etemadi and B. Drévillon, European Mater. Res. Soc. (E-MRS) Conf., Strasbourg, 22-26 May 1995, Synth. Met. 76 (1996) 191.
    • (1995) Synth. Met. , vol.76 , pp. 191
    • Bourée, I.E.1    Godet, C.2    Etemadi, R.3    Drévillon, B.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.