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Volumn 198-200, Issue PART 2, 1996, Pages 623-627
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Optical and luminescence properties of polymer-like a-C:H films deposited in a dual-mode PECVD reactor
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Author keywords
[No Author keywords available]
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Indexed keywords
BUTANE;
CARBON;
CHEMICAL VAPOR DEPOSITION;
DECOMPOSITION;
DIELECTRIC PROPERTIES;
ELLIPSOMETRY;
ION BOMBARDMENT;
LIGHT EXTINCTION;
OPTICAL PROPERTIES;
PHOTOLUMINESCENCE;
PLASMAS;
CLUSTERS;
EXTINCTION COEFFICIENT;
GROWTH TEMPERATURE;
PARAMETRIZATION;
THREE PHASE EFFECTIVE MEDIUM APPROXIMATION;
AMORPHOUS FILMS;
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EID: 17344376804
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-3093(95)00776-8 Document Type: Article |
Times cited : (15)
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References (14)
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