Validation of two-dimensional implant and diffusion profiles using novel scanning capacitance microscope sample preparation and deconvolution techniques

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1998, Pages 717-718

  Yu, Guanyuan M ^a   Griffin, Peter B ^a   Plummer, James D ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; CARRIER CONCENTRATION; DATABASE SYSTEMS; DIFFUSION IN SOLIDS; IMAGE ANALYSIS; MICROSCOPIC EXAMINATION; PATTERN MATCHING;

DATABASE-DRIVEN DECONVOLUTION METHOD; SCANNING CAPACITANCE MICROSCOPE (SCM) MEASUREMENTS; TRANSIENT ENHANCED DIFFUSIONS (TED);

MOS DEVICES;

EID: 0032271799     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)