Step permeability and the relaxation of biperiodic gratings on si(001)

Physical Review Letters

Volumn 78, Issue 17, 1997, Pages 3342-3345

  Tanaka, S ^a   Bartelt, N C ^b   Umbach, C C ^a   Tromp, R M ^c   Blakely, J M ^a  

^a Cornell University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001617455     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.78.3342     Document Type: Article

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