Control of dynamics-coupling effects in piezo-actuator for high-speed AFM operation

Proceedings of the American Control Conference

Volumn 4, Issue , 2004, Pages 3116-3121

  Tien, Szuchi ^a   Zou, Qingze ^a   Devasia, S ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANO-PRECISION POSITIONING; PIEZO-ACTUATORS; PIEZOSCANNERS;

ACTUATORS; ATOMIC FORCE MICROSCOPY; ERROR ANALYSIS; IMAGING SYSTEMS; ITERATIVE METHODS; OXIDATION;

PIEZOELECTRIC DEVICES;

EID: 8744272232     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2004.182764     Document Type: Conference Paper

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