Design and control of optimal feedforward trajectories for scanners: STM example

Proceedings of the American Control Conference

Volumn 3, Issue , 2002, Pages 2305-2312

  Perez, H ^a   Zou, Q ^a   Devasia, S ^a  

^a UNIVERSITY OF WASHINGTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH SPEED SCANNING; MOTION-INDUCED VIBRATIONS; OPTIMAL FEEDFORWARD TRAJECTORIES; QUICK RETURN MECHANISM;

COMPUTER SIMULATION; INTEGRATION; INVERSE PROBLEMS; MOTION CONTROL; NANOTECHNOLOGY; OPTIMAL CONTROL SYSTEMS; SCANNING TUNNELING MICROSCOPY; TRAJECTORIES; VIBRATIONS (MECHANICAL);

CONTROL SYSTEM ANALYSIS;

EID: 0036343314     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2002.1023984     Document Type: Conference Paper

References (21)

1. Vibration compensation for high speed scanning tunneling microscopy
2. Design and application of a continuous repetitive controller for rotating mechanisms
3. Design requirements and reference trajectory generation for a copier paperpath
4. On tracking control of flexible robot arms
5. Minimum-time system-inversion-based motion planning for residual vibration reduction
6. Vector motion processing using spectral windows
7. The art of building small
8. Control of a class of nonlinear systems subject to periodic exogenous signals
9. Nonlinear repetitive control
10. A model-based predictive control approach to repetitive control of continuous processes with periodic operations
11. Preview-based stable-inversion for output tracking of linear systems
12. Inversion of multivariable linear systems
13. Invertibility of linear time-invariant dynamical systems
14. Nonlinear inversion-based output tracking
15. Frequency-shaped cost functionals: Extension of linear-quadratic-gaussian design methods
16. Optical scan-correction system applied to atomic force microscopy
17. Nanofabrication with proximal probes