SCOPUS 정보 검색 플랫폼

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 53, Issue 2, 2015, Pages 193-199

Advanced photoresist technologies by intricate molecular brush architectures: Diblock brush terpolymer-based positive-tone photoresist materials

(12) Sun, Guorong a,b Cho, Sangho a,b Yang, Fan a He, Xun a,b Pavía Sanders, Adriana a,b Clark, Corrie a,b Raymond, Jeffery E a,b Verkhoturov, Stanislav V a Schweikert, Emile A a Thackeray, James W c Trefonas, Peter c Wooley, Karen L a,b

a TEXAS A AND M UNIVERSITY (United States)

b Texas AandM University (United States)

c Dow Electronic Materials (United States)

Author keywords

diblock brush terpolymer; lithography; photoresists; ROMP; vertical alignment on substrate

Indexed keywords

ALIGNMENT; LITHOGRAPHY; POLYMER FILMS;

CYLINDRICAL POLYMER BRUSHES; DIBLOCKS; FUNCTIONAL COMPOSITIONS; PHOTORESIST MATERIALS; REGIOCHEMICAL CONTROL; ROMP; SELECTIVE PARTITION; VERTICAL ALIGNMENT;

PHOTORESISTS;

EID: 85027927046 PISSN: 0887624X EISSN: 10990518 Source Type: Journal
DOI: 10.1002/pola.27362 Document Type: Article

Times cited : (11)

References (36)

1
- 0022201082
- S. A. MacDonald, J. M. J. Fréchet, H. Ito, C. G. Willson, Microelectron. Eng. 1985, 3, 277-278.
- (1985) Microelectron. Eng. , vol.3 , pp. 277-278
- Macdonald, S.A.¹ Fréchet, J.M.J.² Ito, H.³ Willson, C.G.⁴

2
- 85028150697
- J. M. J. Fréchet, J. M. Havard, S. M. Lee, S.-Y. Shim, E. J. Urankar, Polym. Mater. Sci. Eng. 1995, 72, 4-5.
- (1995) Polym. Mater. Sci. Eng. , vol.72 , pp. 4-5
- Fréchet, J.M.J.¹ Havard, J.M.² Lee, S.M.³ Shim, S.-Y.⁴ Urankar, E.J.⁵

3
- 17144368056
- H. Ito, Adv. Polym. Sci. 2005, 172, 37-245.
- (2005) Adv. Polym. Sci. , vol.172 , pp. 37-245
- Ito, H.¹

4
- 79955887078
- J. W. Thackeray, Proc. SPIE 2011, 7972, 797204-01-797204-14.
- (2011) Proc. SPIE , vol.7972 , pp. 79720401-79720414
- Thackeray, J.W.¹

5
- 0004401787
- M. Yoshida, J. M. J. Fréchet, Polymer 1994, 35, 5-13.
- (1994) Polymer , vol.35 , pp. 5-13
- Yoshida, M.¹ Fréchet, J.M.J.²

6
- 0344906082
- Q. J. Niu, J. M. J. Fréchet, Angew. Chem. Int. Ed. 1998, 37, 667-670.
- (1998) Angew. Chem. Int. Ed. , vol.37 , pp. 667-670
- Niu, Q.J.¹ Fréchet, J.M.J.²

7
- 0033522047
- D. C. Tully, K. Wilder, J. M. J. Fréchet, A. R. Trimble, C. F. Quate, Adv. Mater. 1999, 11, 314-318.
- (1999) Adv. Mater. , vol.11 , pp. 314-318
- Tully, D.C.¹ Wilder, K.² Fréchet, J.M.J.³ Trimble, A.R.⁴ Quate, C.F.⁵

8
- 65149105799
- C. L. Chochos, E. Ismailova, C. Brochon, N. Leclerc, R. Tiron, C. Sourd, P. Bandelier, J. Foucher, H. Ridaoui, A. Dirani, O. Soppera, D. Perret, C. Brault, C. A. Serra, G. Hadziioannou, Adv. Mater. 2009, 21, 1121-1125.
- (2009) Adv. Mater. , vol.21 , pp. 1121-1125
- Chochos, C.L.¹ Ismailova, E.² Brochon, C.³ Leclerc, N.⁴ Tiron, R.⁵ Sourd, C.⁶ Bandelier, P.⁷ Foucher, J.⁸ Ridaoui, H.⁹ Dirani, A.¹⁰ Soppera, O.¹¹ Perret, D.¹² Brault, C.¹³ Serra, C.A.¹⁴ Hadziioannou, G.¹⁵

9
- 84869432609
- F. Wieberger, C. Neuber, C. K. Ober, H.-W. Schmidt, Adv. Mater. 2012, 24, 5939-5944.
- (2012) Adv. Mater. , vol.24 , pp. 5939-5944
- Wieberger, F.¹ Neuber, C.² Ober, C.K.³ Schmidt, H.-W.⁴

10
- 84875442436
- G. Sun, S. Cho, C. Clark, S. V. Verkhoturov, M. J. Eller, A. Li, A. Pavía-Sanders, E. A. Schweikert, J. W. Thackeray, P. Trefonas, K. L. Wooley, J. Am. Chem. Soc. 2013, 135, 4203-4206.
- (2013) J. Am. Chem. Soc. , vol.135 , pp. 4203-4206
- Sun, G.¹ Cho, S.² Clark, C.³ Verkhoturov, S.V.⁴ Eller, M.J.⁵ Li, A.⁶ Pavía-Sanders, A.⁷ Schweikert, E.A.⁸ Thackeray, J.W.⁹ Trefonas, P.¹⁰ Wooley, K.L.¹¹

11
- 0001182359
- J. M. J. Fréchet, T. G. Tessier, C. G. Willson, H. Ito, Macromolecules 1985, 18, 317-321.
- (1985) Macromolecules , vol.18 , pp. 317-321
- Fréchet, J.M.J.¹ Tessier, T.G.² Willson, C.G.³ Ito, H.⁴

12
- 0026137018
- J. M. J. Fréchet, S. Matuszczak, B. Reck, H. D. H. Stover, C. G. Willson, Macromolecules 1991, 24, 1746-1754.
- (1991) Macromolecules , vol.24 , pp. 1746-1754
- Fréchet, J.M.J.¹ Matuszczak, S.² Reck, B.³ Stover, H.D.H.⁴ Willson, C.G.⁵

13
- 0001512088
- S. Matuszczak, J. F. Cameron, J. M. J. Fréchet, C. G. Wilson, J. Mater. Chem. 1991, 1, 1045-1050.
- (1991) J. Mater. Chem. , vol.1 , pp. 1045-1050
- Matuszczak, S.¹ Cameron, J.F.² Fréchet, J.M.J.³ Wilson, C.G.⁴

14
- 0001687647
- J. T. Fahey, J. M. J. Fréchet, Y. Shacham-Diamand, J. Mater. Chem. 1994, 4, 1533-1538.
- (1994) J. Mater. Chem. , vol.4 , pp. 1533-1538
- Fahey, J.T.¹ Fréchet, J.M.J.² Shacham-Diamand, Y.³

15
- 18844441236
- S. M. Lee, J. M. J. Fréchet, Chem. Mater. 1994, 6, 1838-1841.
- (1994) Chem. Mater. , vol.6 , pp. 1838-1841
- Lee, S.M.¹ Fréchet, J.M.J.²

16
- 0028479742
- S. M. Lee, J. M. J. Fréchet, C. G. Willson, Macromolecules 1994, 27, 5154-5159.
- (1994) Macromolecules , vol.27 , pp. 5154-5159
- Lee, S.M.¹ Fréchet, J.M.J.² Willson, C.G.³

17
- 0030466713
- J. F. Cameron, C. G. Willson, J. M. J. Fréchet, J. Am. Chem. Soc. 1996, 118, 12925-12937.
- (1996) J. Am. Chem. Soc. , vol.118 , pp. 12925-12937
- Cameron, J.F.¹ Willson, C.G.² Fréchet, J.M.J.³

18
- 0000483275
- Q. Lin, T. Steinhaeusler, L. Simpson, M. Wilder, D. R. Medeiros, C. G. Willson, J. Havard, J. M. J. Fréchet, Chem. Mater. 1997, 9, 1725-1730.
- (1997) Chem. Mater. , vol.9 , pp. 1725-1730
- Lin, Q.¹ Steinhaeusler, T.² Simpson, L.³ Wilder, M.⁴ Medeiros, D.R.⁵ Willson, C.G.⁶ Havard, J.⁷ Fréchet, J.M.J.⁸

19
- 0001235395
- J. M. Havard, S.-Y. Shim, J. M. J. Fréchet, Q. Lin, D. R. Medeiros, C. G. Willson, J. D. Byers, Chem. Mater. 1999, 11, 719-725.
- (1999) Chem. Mater. , vol.11 , pp. 719-725
- Havard, J.M.¹ Shim, S.-Y.² Fréchet, J.M.J.³ Lin, Q.⁴ Medeiros, D.R.⁵ Willson, C.G.⁶ Byers, J.D.⁷

20
- 0034248790
- D. C. Tully, A. R. Trimble, J. M. J. Fréchet, Adv. Mater. 2000, 12, 1118-1122.
- (2000) Adv. Mater. , vol.12 , pp. 1118-1122
- Tully, D.C.¹ Trimble, A.R.² Fréchet, J.M.J.³

21
- 2642542283
- M. Rolandi, I. Suez, H. Dai, J. M. J. Fréchet, Nano Lett. 2004, 4, 889-893.
- (2004) Nano Lett. , vol.4 , pp. 889-893
- Rolandi, M.¹ Suez, I.² Dai, H.³ Fréchet, J.M.J.⁴

22
- 0000296299
- J. M. J. Fréchet, Pure Appl. Chem. 1992, 64, 1239-1248.
- (1992) Pure Appl. Chem. , vol.64 , pp. 1239-1248
- Fréchet, J.M.J.¹

23
- 48449105272
- S. S. Sheiko, B. S. Sumerlin, K. Matyjaszewski, Prog. Polym. Sci. 2008, 33, 759.
- (2008) Prog. Polym. Sci. , vol.33 , pp. 759
- Sheiko, S.S.¹ Sumerlin, B.S.² Matyjaszewski, K.³

24
- 84866429093
- J. Rzayev, ACS Macro Lett. 2012, 1, 1146-1149.
- (2012) ACS Macro Lett. , vol.1 , pp. 1146-1149
- Rzayev, J.¹

25
- 73249131397
- Y. Xia, B. D. Olsen, J. A. Kornfield, R. H. Grubbs, J. Am. Chem. Soc. 2009, 131, 18525-18532.
- (2009) J. Am. Chem. Soc. , vol.131 , pp. 18525-18532
- Xia, Y.¹ Olsen, B.D.² Kornfield, J.A.³ Grubbs, R.H.⁴

26
- 79952600007
- J. Bolton, T. S. Bailey, J. Rzayev, Nano Lett. 2011, 11, 998-1001.
- (2011) Nano Lett. , vol.11 , pp. 998-1001
- Bolton, J.¹ Bailey, T.S.² Rzayev, J.³

27
- 79851469371
- J. A. Johnson, Y. Y. Lu, A. O. Burts, Y. H. Lim, M. G. Finn, J. T. Koberstein, N. J. Turro, D. A. Tirrell, R. H. Grubbs, J. Am. Chem. Soc. 2011, 133, 559-566.
- (2011) J. Am. Chem. Soc. , vol.133 , pp. 559-566
- Johnson, J.A.¹ Lu, Y.Y.² Burts, A.O.³ Lim, Y.H.⁴ Finn, M.G.⁵ Koberstein, J.T.⁶ Turro, N.J.⁷ Tirrell, D.A.⁸ Grubbs, R.H.⁹

28
- 84875673450
- W. Gu, J. Huh, S. W. Hong, B. R. Sveinbjornsson, C. Park, R. H. Grubbs, T. P. Russell, ACS Nano 2013, 7, 2551-2558.
- (2013) ACS Nano , vol.7 , pp. 2551-2558
- Gu, W.¹ Huh, J.² Hong, S.W.³ Sveinbjornsson, B.R.⁴ Park, C.⁵ Grubbs, R.H.⁶ Russell, T.P.⁷

29
- 84890684762
- P. Trefonas, J. W. Thackeray, G. Sun, S. Cho, C. Clark, S. V. Verkhoturov, M. J. Eller, A. Li, A. Pavía-Sanders, E. A. Schweikert, K. L. Wooley, J. Micro/Nanolith. MEMS MOEMS 2013, 12, 043006-01-043006-10.
- (2013) J. Micro/Nanolith. MEMS MOEMS , vol.12 , pp. 04300601-04300610
- Trefonas, P.¹ Thackeray, J.W.² Sun, G.³ Cho, S.⁴ Clark, C.⁵ Verkhoturov, S.V.⁶ Eller, M.J.⁷ Li, A.⁸ Pavía-Sanders, A.⁹ Schweikert, E.A.¹⁰ Wooley, K.L.¹¹

30
- 78649988903
- S. Sutthasupa, M. Shiotsuki, F. Sanda, Polym. J. 2010, 42, 905-915.
- (2010) Polym. J. , vol.42 , pp. 905-915
- Sutthasupa, S.¹ Shiotsuki, M.² Sanda, F.³

31
- 44949084342
- J. Ma, C. Cheng, G. Sun, K. L. Wooley, J. Polym. Sci. Part A: Polym. Chem. 2008, 46, 3488-3498.
- (2008) J. Polym. Sci. Part A: Polym. Chem. , vol.46 , pp. 3488-3498
- Ma, J.¹ Cheng, C.² Sun, G.³ Wooley, K.L.⁴

32
- 84894034368
- S. Cho, F. Yang, G. Sun, M. J. Eller, C. Clark, E. A. Schweikert, J. W. Thackeray, P. Trefonas, K. L. Wooley, Macromol. Rapid Commun. 2014, 35, 437-441.
- (2014) Macromol. Rapid Commun. , vol.35 , pp. 437-441
- Cho, S.¹ Yang, F.² Sun, G.³ Eller, M.J.⁴ Clark, C.⁵ Schweikert, E.A.⁶ Thackeray, J.W.⁷ Trefonas, P.⁸ Wooley, K.L.⁹

33
- 70349438686
- Z. Li, K. Zhang, J. Ma, C. Cheng, K. L. Wooley, J. Polym. Sci. Part A: Polym. Chem. 2009, 47, 5557-5563.
- (2009) J. Polym. Sci. Part A: Polym. Chem. , vol.47 , pp. 5557-5563
- Li, Z.¹ Zhang, K.² Ma, J.³ Cheng, C.⁴ Wooley, K.L.⁵

34
- 84880167756
- W. Gu, J. Xu, J.-K. Kim, S. W. Hong, X. Wei, X. Yang, K. Y. Lee, D. S. Kuo, S. Xiao, T. P. Russell, Adv. Mater. 2013, 25, 3677-3682.
- (2013) Adv. Mater. , vol.25 , pp. 3677-3682
- Gu, W.¹ Xu, J.² Kim, J.-K.³ Hong, S.W.⁴ Wei, X.⁵ Yang, X.⁶ Lee, K.Y.⁷ Kuo, D.S.⁸ Xiao, S.⁹ Russell, T.P.¹⁰

35
- 0031039786
- P. Mansky, Y. Liu, E. Huang, T. P. Russell, C. Hawker, Science 1997, 275, 1458-1460.
- (1997) Science , vol.275 , pp. 1458-1460
- Mansky, P.¹ Liu, Y.² Huang, E.³ Russell, T.P.⁴ Hawker, C.⁵

36
- 0032624344
- Y. Uetani, H. Fujishima, K. Araki, K. Endo, I. Takemoto, Proc. SPIE 1999, 3687, 510-517.
- (1999) Proc. SPIE , vol.3687 , pp. 510-517
- Uetani, Y.¹ Fujishima, H.² Araki, K.³ Endo, K.⁴ Takemoto, I.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.