Minimising idle times in cluster tools in the semiconductor industry

International Journal of Production Research

Volumn 48, Issue 21, 2010, Pages 6443-6459

  Lati, N ^a,b   Gilad, I ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b Checkpoint Software Technologies Ltd   (Israel)

Author keywords

bottleneck; cluster tool; idle time; robotic cell; sequencing; waiting time

Indexed keywords

BOTTLENECK; CLUSTER TOOL; IDLE TIME; ROBOTIC CELL; SEQUENCING; WAITING-TIME;

LINEAR PROGRAMMING; MARKING MACHINES; OPTIMIZATION; ROBOTICS; SCHEDULING ALGORITHMS; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

CLUSTERING ALGORITHMS;

EID: 77956707726     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540903280556     Document Type: Article

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