SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium-Proceedings

Volumn 615, Issue , 2000, Pages

Room temperature recrystallization of electroplated copper thin films: Methods and mechanisms

(7) Walther, D a Gross, M E a Evans Lutterodt, K a Brown, W L a Oh, M b Merchant, S b Naresh, P b

a LUCENT TECHNOLOGIES (United States)

b NOKIA RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTALLOGRAPHY; DATA REDUCTION; ELECTROPLATING; GRAIN BOUNDARIES; ION BEAMS; RECRYSTALLIZATION (METALLURGY); TEXTURES; X RAY DIFFRACTION ANALYSIS; GRAIN GROWTH; IMAGE ANALYSIS; NUCLEATION; PHASE TRANSITIONS;

FOCUSED ION BEAM (FIB) MICROSCOPES; SHEET RESISTANCE;

THIN FILMS;

EID: 85009889650 PISSN: 02729172 EISSN: None Source Type: Journal
DOI: 10.1557/proc-612-d10.1.1 Document Type: Article

Times cited : (23)

References (22)

2
- 0000034975
- (1999) Appl. Phys. Lett. , vol.74 , pp. 2945
- Hu, C.-K.¹ Rosenberg, R.² Lee, K.Y.³

3
- 0031632786
- (1998) Digest IEEE 1998 Symp. VLSI Tech. , pp. 156
- Ryu, C.¹ Kwon, K.-W.² Loke, A.L.S.³ Dubin, V.M.⁴ Rahim, R.A.⁵ Ray, G.W.⁶ Wong, S.S.⁷

4
- 0032166781
- (1998) IBM J. Res. Devel. , vol.42 , pp. 567
- Andricacos, P.C.¹ Uzoh, C.² Dukovic, J.O.³ Horkans, J.⁴ Deligianni, H.⁵

5
- 36849104832
- (1972) J. Appl. Phys. , vol.43 , pp. 867
- Gangulee, A.¹

6
- 0001660597
- (1965) J. Electrochem. Soc. , vol.112 , pp. 167
- Hofer, E.M.¹ Hintermann, H.E.²

7
- 0022162802
- (1985) J. Appl. Electrochem. , vol.15 , pp. 887
- Tomov, I.V.¹ Stoychev, D.S.² Vitanova, I.B.³

8
- 85037492583
- San Francisco, CA, June
- (1998) Intl. Interconnect Technol. Conf. Abstracts , pp. 166-168
- Ritzdorf, T.¹ Graham, L.² Jin, S.³ Mu, C.⁴ Fraser, D.⁵

9
- 0000729886
- (1998) J. Appl. Phys. , vol.84 , pp. 5547
- Lingk, C.¹ Gross, M.E.²

10
- 0001209968
- edited by G.S. Sandhu, H. Koerner, M. Murakami, Y. Yasuda, and N. Kobayashi (Mater. Res. Soc., Pittsburgh, PA)
- (1999) Adv. Metalliz. Conf. 1998 , pp. 209-215
- Jiang, Q.-T.¹ Smekalin, K.²

11
- 0002667992
- edited by G.S. Sandhu, H. Koerner, M. Murakami, Y. Yasuda, and N. Kobayashi (Mater. Res. Soc., Pittsburgh, PA)
- (1999) Adv. Metalliz. Conf. 1998 , pp. 81-87
- Cabral, C.¹ Andricacos, P.C.² Gignac, L.³ Noyan, I.C.⁴ Rodbell, K.P.⁵ Shaw, T.M.⁶ Rosenberg, R.⁷ Harper, J.M.E.⁸ DeHaven, P.W.⁹ Locke, P.S.¹⁰ Malhotra, S.¹¹ Uzoh, C.¹² Klepeis, S.J.¹³

12
- 0033279577
- (1999) Mat. Res. Soc. Proc. , vol.564 , pp. 373
- Gignac, L.M.¹ Rodbell, K.P.² Cabral, C.³ Andricacos, P.C.⁴ Rice, P.M.⁵ Beyers, R.B.⁶ Locke, P.S.⁷ Klepeis, S.J.⁸

13
- 0033279578
- (1999) Mat. Res. Soc. Symp. Proc. , vol.564 , pp. 379
- Gross, M.E.¹ Drese, R.² Lingk, C.³ Brown, W.L.⁴ Evans-Lutterodt, K.⁵ Barr, D.⁶ Golovin, D.⁷ Ritzdorf, T.⁸ Turner, J.⁹ Graham, L.¹⁰

14
- 0032620394
- (1999) J. Applied Phys. , vol.86 , pp. 2516
- Harper, J.M.E.¹ Cabral, C.² Andricacos, P.C.³ Gignac, L.⁴ Noyan, I.C.⁵ Rodbell, K.P.⁶ Hu, C.K.⁷

15
- 0001325323
- (1999) J. Appl. Phys. , vol.86 , pp. 3642
- Brongersma, S.H.¹ Richard, E.² Vervoort, I.³ Bender, H.⁴ Vandervorst, W.⁵ Lagrange, S.⁶ Beyer, G.⁷ Maex, K.⁸

16
- 85009837450
- edited by M.E. Gross, T. Gessner, N. Kobayashi, and Y. Yasuda (Mater. Res. Soc., Pittsburgh, PA), in press
- (2000) Adv. Metalliz. Conf. 1999
- Malhotra, S.G.¹ Locke, P.S.² Simon, A.H.³ Fluegel, J.⁴ Parks, C.⁵ DeHaven, P.⁶ Hemmes, D.G.⁷ Jackson, R.⁸ Patton, E.⁹

17
- 85009852702
- edited by M.E. Gross, T. Gessner, N. Kobayashi, and Y. Yasuda (Mater. Res. Soc., Pittsburgh, PA), in press
- (2000) Adv. Metalliz. Conf. 1999
- Gross, M.E.¹ Drese, R.² Golovin, D.³ Brown, W.L.⁴ Lingk, C.⁵ Merchant, S.⁶ Oh, M.⁷

18
- 85009928130
- HyperNex, State College, PA 16801

19
- 84994808033
- Pergamon, New York
- (1996) Recrystallization and Related Annealing Phenomena
- Humphreys, F.J.¹ Hatherly, M.²

20
- 85009853725
- unpublished results
- Gross, M.E.¹ Walther, D.²

21
- 0003482692
- Chapman & Hall, London
- (1992) Phase Transformations in Metals and Alloys , pp. 123
- Porter, D.A.¹ Easterling, K.E.²

22
- 0000447658
- (2000) J. Appl. Phys. , vol.87 , pp. 2232
- Lingk, C.¹ Gross, M.E.² Brown, W.L.³

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