Texture development of blanket electroplated copper films

Journal of Applied Physics

Volumn 87, Issue 5, 2000, Pages 2232-2236

  Lingk, C ^a   Gross, M E ^a   Brown, W L ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000447658     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372166     Document Type: Article

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