Double-Sided, Double-Type-Column 3-D Detectors: Design, Fabrication, and Technology Evaluation

IEEE Transactions on Nuclear Science

Volumn 55, Issue 5, 2008, Pages 2775-2784

  Zoboli, Andrea ^a   Boscardin, Maurizio ^b   Bosisio, Luciano ^c   Betta, Gian Franco Dalla ^a   Piemonte, Claudio ^b   Ronchin, Sabina ^b   Zorzi, Nicola ^b  

^a INFN TIFPA   (Italy)

^b FONDAZIONE BRUNO KESSLER   (Italy)

^c UNIVERSITY OF TRIESTE   (Italy)

Author keywords

3 D technology; DRIE; numerical simulations; silicon radiation detectors

Indexed keywords

EID: 85008030151     PISSN: 00189499     EISSN: 15581578     Source Type: Journal    
DOI: 10.1109/TNS.2008.2002885     Document Type: Article

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