Fabrication of 3D detectors with columnar electrodes of the same doping type

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 573, Issue 1-2, 2007, Pages 224-227

  Ronchin, Sabina ^a   Boscardin, Maurizio ^a   Piemonte, Claudio ^a   Pozza, Alberto ^a   Zorzi, Nicola ^a   Dalla Betta, Gian Franco ^b   Bosisio, Luciano ^c   Pellegrini, Giulio ^d  

^a ITC IRST   (Italy)

^b UNIVERSITY OF TRENTO   (Italy)

^c UNIVERSITY OF TRIESTE   (Italy)

^d INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

3D detectors; DRIE etching; Electrical characterization; Fabrication technology; Silicon detectors

Indexed keywords

DOPING (ADDITIVES); ELECTRIC PROPERTIES; ELECTRODES; ETCHING; HIGH ENERGY PHYSICS;

3D DETECTORS; DRIE ETCHING; ELECTRICAL CHARACTERIZATION; FABRICATION TECHNOLOGY;

SILICON DETECTORS;

EID: 33847612025     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2006.10.388     Document Type: Article

References (5)

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4. S. Eränen, et al., "Silicon semi 3d radiation detectors",in: 2004 IEEE Nuclear Science Symposium, Conference Record, Paper N28-3, Rome (Italy), October 16-22, 2004.
5. Härkönen J., et al. Nucl. Instr. and Meth. A 552 (2005) 43