Development of 3D detectors featuring columnar electrodes of the same doping type

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 541, Issue 1-2, 2005, Pages 441-448

  Piemonte, Claudio ^a   Boscardin, Maurizio ^a   Dalla Betta, Gian Franco ^b   Ronchin, Sabina ^a   Zorzi, Nicola ^a  

^a ITC IRST   (Italy)

^b UNIVERSITY OF TRENTO   (Italy)

Author keywords

3D detectors; Device simulations; DRIE etching; Fabrication technology; Silicon detectors

Indexed keywords

COMPUTER SIMULATION; DOPING (ADDITIVES); ELECTRIC POTENTIAL; ELECTRODES; ETCHING; PARTICLE DETECTORS;

3D DETECTORS; DEVICE SIMULATIONS; DRIE ETCHING; FABRICATION TECHNOLOGY; SILICON DETECTORS;

SILICON SENSORS;

EID: 15844392712     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2005.01.087     Document Type: Conference Paper

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