Flexible Near-Field Nanopatterning with Ultrathin, Conformal Phase Masks on Nonplanar Substrates for Biomimetic Hierarchical Photonic Structures

ACS Nano

Volumn 10, Issue 4, 2016, Pages 4609-4617

  Kwon, Young Woo ^a   Park, Junyong ^b   Kim, Taehoon ^b   Kang, Seok Hee ^a   Kim, Hyowook ^b   Shin, Jonghwa ^b   Jeon, Seokwoo ^b   Hong, Suck Won ^a  

^a Pusan National University   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

antireflective diffusers; biomimetics; conformal phase masks; hierarchical structures; nanofabrication; near field phase shift lithography

Indexed keywords

BIOMIMETICS; FLEXIBLE DISPLAYS; LITHOGRAPHY; MASKS; MICROOPTICS; NANOTECHNOLOGY; PHASE SHIFT; PHASE SHIFTERS; POLYVINYL ALCOHOLS;

ANTI-REFLECTIVE; FUNCTIONAL NANOSTRUCTURES; HIERARCHICAL PLATFORMS; HIERARCHICAL STRUCTURES; MULTI-SCALE STRUCTURES; PHASE MASKS; PHASE SHIFT LITHOGRAPHY; THREE-DIMENSIONAL ARCHITECTURE;

DIFFUSERS (OPTICAL);

EID: 84967175522     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/acsnano.6b00816     Document Type: Article

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