Rapid Stencil Mask Fabrication Enabled One-Step Polymer-Free Graphene Patterning and Direct Transfer for Flexible Graphene Devices

Scientific Reports

Volumn 6, Issue , 2016, Pages

  Yong, Keong ^a   Ashraf, Ali ^a   Kang, Pilgyu ^a   Nam, Sungwoo ^a,b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84964608682     PISSN: None     EISSN: 20452322     Source Type: Journal    
DOI: 10.1038/srep24890     Document Type: Article

References (52)

1. Novoselov, K. S. et al. Electric Field Effect in Atomically Thin Carbon Films. Science (80) 306, 666-669 (2004).
2. Lee, C., Wei, X., Kysar, J. W., Hone, J. Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene. Science (80) 321, 385-388 (2008).
3. Bolotin, K. I. et al. Ultrahigh electron mobility in suspended graphene. Solid State Commun. 146, 351-355 (2008).
4. Balandin, A. a. et al. Superior thermal conductivity of single-layer graphene. Nano Lett. 8, 902-907 (2008).
5. Raj, R., Maroo, S. C., Wang, E. N. Wettability of graphene. Nano Lett. 13, 1509-1515 (2013).
6. Park, S., Ruoff, R. S. Chemical methods for the production of graphenes. Nat. Nanotechnol. 4, 217-24 (2009).
7. Schedin, F. et al. Detection of individual gas molecules adsorbed on graphene. Nat. Mater. 6, 652-655 (2007).
8. Cohen-Karni, T., Qing, Q., Li, Q., Fang, Y., Lieber, C. M. Graphene and nanowire transistors for cellular interfaces and electrical recording. Nano Lett. 10, 1098-1102 (2010).
9. Choi, J., Wang, M. C., Cha, R. Y. S., Park, W. Il & Nam, S. Graphene bioelectronics. Biomed. Eng. Lett. 3, 201-208 (2013).
10. Ghosh, S. et al. Extremely high thermal conductivity of graphene: Prospects for thermal management applications in nanoelectronic circuits. Appl. Phys. Lett. 92, 15-17 (2008).
11. Bae, S. et al. Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat. Nanotechnol. 5, 574-578 (2010).
12. Kim, K. S. et al. Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature 457, 706-10 (2009).
13. Li, X. et al. Large-area synthesis of high-quality and uniform graphene films on copper foils. Science (80). 324, 1312-1314 (2009).
14. Hofmann, M., Hsieh, Y.-P., Hsu, A. L., Kong, J. Scalable, flexible and high resolution patterning of CVD graphene. Nanoscale 6, 289-92 (2014).
15. Hong, J.-Y., Jang, J. Micropatterning of graphene sheets: recent advances in techniques and applications. J. Mater. Chem. 22, 8179-8191 (2012).
16. Zhou, Y., Loh, K. P. Making patterns on graphene. Adv. Mater. 22, 3615-3620 (2010).
17. Liang, X., Fu, Z., Chou, S. Y. Graphene transistors fabricated via transfer-printing in device active-areas on large wafer. Nano Lett. 7, 3840-3844 (2007).
18. Eda, G., Fanchini, G., Chhowalla, M. Large-area ultrathin films of reduced graphene oxide as a transparent and flexible electronic material. Nat. Nanotechnol. 3, 270-274 (2008).
19. Lemme, M. C. et al. Etching of graphene devices with a helium ion beam. ACS Nano 3, 2674-2676 (2009).
20. Strong, V. et al. Patterning and electronic tuning of laser scribed graphene for flexible all-carbon devices. ACS Nano 6, 1395-1403 (2012).
21. Sahin, R., Simsek, E., Akturk, S. Nanoscale patterning of graphene through femtosecond laser ablation. Appl. Phys. Lett. 104, 053118 (2014).
22. Sessi, P., Guest, J. R., Bode, M., Guisinger, N. P. Patterning graphene at the nanometer scale via hydrogen desorption. Nano Lett. 9, 4343-4347 (2009).
23. Kim, Y. S. et al. Direct growth of patterned graphene on SiO2 substrates without the use of catalysts or lithography. Nanoscale 6, 10100-5 (2014).
24. Reina, A. et al. Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition. Nano Lett. 9, 30-35 (2009).
25. Wang, M. et al. CVD growth of large area smooth-edged graphene nanomesh by nanosphere lithography. Sci. Rep. 3, 1238 (2013).
26. Park, B. et al. A Facile Route for Patterned Growth of Metal-Insulator Carbon Lateral Junction through One-Pot Synthesis. ACS Nano 9, 8352-8360 (2015).
27. Zhuo, Q. et al. Transfer-Free Synthesis of Doped and Patterned Graphene Films. ACS Nano 9, 594-601 (2015).
28. Pirkle, a. et al. The effect of chemical residues on the physical and electrical properties of chemical vapor deposited graphene transferred to SiO. Appl. Phys. Lett. 99, 122108-122108-3 (2011).
29. Vazquez-Mena, O., Gross, L., Xie, S., Villanueva, L. G., Brugger, J. Resistless nanofabrication by stencil lithography: A review. Microelectron. Eng. 132, 236-254 (2015).
30. Bao, W. et al. Lithography-free fabrication of high quality substrate-supported and freestanding graphene devices. Nano Res. 3, 98-102 (2010).
31. Prado, M. C., Jariwala, D., Marks, T. J., Hersam, M. C. Optimization of graphene dry etching conditions via combined microscopic and spectroscopic analysis. Appl. Phys. Lett. 102, 193111-4 (2013).
32. Zandiatashbar, A. et al. Effect of defects on the intrinsic strength and stiffness of graphene. Nat. Commun. 5, 3186 (2014).
33. Al-Mumen, H., Rao, F., Li, W., Dong, L. Singular Sheet Etching of Graphene with Oxygen Plasma. Nano-Micro Lett. 6, 116-124 (2014).
34. Lim, W. S. et al. Atomic layer etching of graphene for full graphene device fabrication. Carbon N. Y. 50, 429-435 (2012).
35. Shi, Z. et al. Patterning graphene with zigzag edges by self-aligned anisotropic etching. Adv. Mater. 23, 3061-3065 (2011).
36. Cancado, L. G. et al. Quantifying defects in graphene via Raman spectroscopy at different excitation energies. Nano Lett. 11, 3190-3196 (2011).
37. Childres, I., Jauregui, L. A., Tian, J., Chen, Y. P. Effect of oxygen plasma etching on graphene studied using Raman spectroscopy and electronic transport measurements. New J. Phys. 13, 25008 (2011).
38. Shin, Y. J. et al. Surface-energy engineering of graphene. Langmuir 26, 3798-3802 (2010).
39. Wang, M. C. et al. Heterogeneous, three-dimensional texturing of graphene. Nano Lett. 15, 1829-35 (2015).
40. Leem, J., Wang, M. C., Kang, P., Nam, S. Mechanically Self-Assembled, Three-Dimensional Graphene-Gold Hybrid Nanostructures for Advanced Nanoplasmonic Sensors. Nano Lett. 15, 7684-7690 (2015).
41. Zang, J. et al. Multifunctionality and control of the crumpling and unfolding of large-area graphene. Nat Mater 12, 321-325 (2013).
42. Chen, X., Hutchinson, J. W. Herringbone Buckling Patterns of Compressed Thin Films on Compliant Substrates. J. Appl. Mech. 71, 597 (2004).
43. Bae, S. H. et al. Graphene-based transparent strain sensor. Carbon N. Y. 51, 236-242 (2013).
44. Wang, Y. et al. Super-elastic graphene ripples for flexible strain sensors. ACS Nano 5, 3645-3650 (2011).
45. Preston, D. J., Mafra, D. L., Miljkovic, N., Kong, J., Wang, E. N. Scalable Graphene Coatings for Enhanced Condensation Heat Transfer. Nano Lett. 15, 2902-2909 (2015).
46. Chatterjee, A., Derby, M. M., Peles, Y., Jensen, M. K. Condensation heat transfer on patterned surfaces. Int. J. Heat Mass Transf. 66, 889-897 (2013).
47. Blossey, R. Self-cleaning surfaces-virtual realities. Nat. Mater. 2, 301-306 (2003).
48. Zhou, K., Heikenfeld, J., Dean, K. A., Howard, E. M., Johnson, M. R. A full description of a simple and scalable fabrication process for electrowetting displays. J. Micromechanics Microengineering 19, 65029 (2009).
49. Li, Z. et al. Effect of airborne contaminants on the wettability of supported graphene and graphite. Nat. Mater. 12, 925-31 (2013).
50. Song, L. et al. Large scale growth and characterization of atomic hexagonal boron nitride layers. Nano Lett. 10, 3209-3215 (2010).
51. Zhao, J. et al. Integrated Flexible and High-Quality Thin Film Transistors Based on Monolayer MoS2. Adv. Electron. Mater doi: 10.1002/aelm.201500379 (2016).
52. Wang, X. R., Dai, H. J. Etching and narrowing of graphene from the edges. Nat Chem 2, 661-665 (2010).