Molecular Layer Deposition (MLD): Monomolecular-Step Growth of Polymers with Designated Sequences

Macromolecular Symposia

Volumn 361, Issue 1, 2016, Pages 141-148

  Yoshimura, Tetsuzo ^a  

^a TOKYO UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Molecular Layer Deposition (MLD); molecular targeted drug delivery; mono molecular step growth; quantum dots; tailored organic thin films

Indexed keywords

ATOMIC LAYER DEPOSITION; DEPOSITION; NANOCRYSTALS; POLYMERS; SELF ASSEMBLY; SEMICONDUCTOR QUANTUM DOTS; THIN FILMS;

ELECTRON WAVE FUNCTIONS; EXPERIMENTAL DEMONSTRATIONS; FABRICATION PROCESS; MOLECULAR ARRANGEMENTS; MOLECULAR LAYER DEPOSITIONS (MLD); MULTIPLE QUANTUM DOTS; ORGANIC THIN FILMS; TARGETED DRUG DELIVERY;

FILM GROWTH;

EID: 84962187938     PISSN: 10221360     EISSN: 15213900     Source Type: Journal    
DOI: 10.1002/masy.201400233     Document Type: Article

References (40)

1. T. Yoshimura, S. Tatsuura, W. Sotoyama, Appl. Phys. Lett. 1991, 59, 482.
2. T. Yoshimura, E. Yano, S. Tatsuura, W. Sotoyama, US Patent 1995, 5, 811.
3. T. Yoshimura, Thin-Film Organic Photonics: Molecular Layer Deposition and Applications, CRC/Taylor & Francis, Boca Raton, Florida 2011.
4. M. Pessa, R. Makela, T. Suntola, Appl. Phys. Lett. 1981, 31, 131.
5. T. Suntola, Thin Solid Films 1992, 216, 84.
6. G. N. Parsons, S. M. George, M. Knez, MRS BULLETIN 2011, 36, 865.
7. H. Zhou, S. F. Bent, J. Vac. Sci. Technol. A 2013, 31, 040801-1.
8. P. Sundberg, M. Karppinen, Beilstein J. Nanotechnol. 2014, 5, 1104.
9. T. Yoshimura, Japanese Patent, Tokukai Hei 3-60487, 1991 [in Japanese].
10. T. Yoshimura, H. Watanabe, C. Yoshino, J. Electrochem. Soc. 2011, 158, 51.
11. J. R. Salem, F. O. Sequeda, J. Duran, W. Y. Lee, J. Vac. Sci. Technol. A 1986, 4, 369.
12. Y. Takahashi, M. Iijima, K. Inagawa, A. Itoh, J. Vac. Sci. Technol. A 1987, 5, 2253.
13. A. Kubono, N. Okui, K. Tanaka, S. Umemoto, T. Sakai, Thin Solid Films 1991, 199, 385.
14. P. W. Loscutoff, S. B. Clendenning, S. F. Bent, Mater. Res. Soc. Symp. Proc. 2010, 1249, 1249-F02-03.
15. H. Zhou, S. F. Bent, ACS Appl. Mater. Interfaces 2011, 505.
16. H. Zhou, M. F. Toney, S. F. Bent, Macromolecules 2013, 46, 5638.
17. X. Liang, A. Weimer, J. Nanopart. Res. 2009, 12, 135.
18. X. Li, A. Lushington, J. Liu, R. Li, X. Sun, Chem. Commun. 2014, 50, 9757.
19. S. M. George, B. Yoon, A. A. Dameron, Acc. Chem. Res. 2009, 42, 498.
20. B. H. Lee, K. H. Lee, S. Im, M. M. Sung, Thin Solid Films 2009, 517, 4056.
21. J. S. Park, H. Chae, H. Chung, S. I. Lee, Semicond. Sci. Technol. 2011, 26, 034001.
22. J. Liu, B. Yoon, E. Kuhlmann, M. Tian, J. Zhu, S. M. George, Y.-C. Lee, R. Yang, Nano Lett. 2013, 13, 5594.
23. J. J. Brown, R. A. Hall, P. E. Kladitis, S. M. George, V. M. Bright, ACS Nano 2013, 7, 7812.
24. M. Vähä-Nissi, J. Sievänen, E. Salo, P. Heikkilä, E. Kenttä, L.-S. Johansson, J. T. Koskinen, A. Harlin, J. Solid State Chem. 2014, 214, 7.
25. S. E. Atanasov, M. D. Losego, B. Gong, E. Sachet, J.-P. Maria, P. S. Williams, G. N. Parsons, Chem. Mater. 2014, 26, 3471.
26. S. Yoshida, T. Ono, M. Esashi, Micro Nano Lett. 2010, 5, 321.
27. T. Yoshimura, Phys. Rev. 1989, B40, 6292.
28. T. Yoshimura, FUJITSU Sci. Tech. J. 1991, 27, 115.
29. T. Yoshimura, S. Tatsuura, W. Sotoyama, A. Matsuura, T. Hayano, Appl. Phys. Lett. 1992, 60, 268.
30. T. Yoshimura, R. Ebihara, A. Oshima, J. Vac. Sci. Technol. A 2011, 29, 051510-1.
31. T. Yoshimura, S. Ishii, J. Vac. Sci. Technol. A 2013, 31, 031501-1.
32. T. Yoshimura, Japanese Patent, Tokukai 2012-45351 2012 [in Japanese].
33. T. Yoshimura, Optical Electronics: Self-Organized Integration and Applications, Pan Stanford Publishing Pte. Ltd., Singapore 2012.
34. T. Yoshimura, Y. Takahashi, M. Inao, M. Lee, W. Chou, S. Beilin, W.V. Wang, J. Roman, T. Massingill, U.S. Patent 6,343,171 B1 2002.
35. T. Yoshimura, N. Terasawa, H. Kazama, Y. Naito, Y. Suzuki, K. Asama, Thin Solid Films 2006, 497, 182.
36. T. Yoshimura, K. Motoyoshi, S. Tatsuura, W. Sotoyama, A. Matsuura, T. Hayano, Jpn. J. Appl. Phys. 1992, 31, L980.
37. T. Yoshimura, S. Ito, T. Nakayama, K. Matsumoto, Appl. Phys. Lett. 2007, 91, 033103-1.
38. C. Prasittichai, H. Zhou, S. F. Bent, ACS Appl. Mater. Interfaces 2013, 5, 13391.
39. F. S. M. Hashemi, C. Prasittichai, S. F. Bent, J. Phys. Chem. C 2014, 118, 10957.
40. T. Yoshimura, C. Yoshino, K. Sasaki, T. Sato, M. Seki, IEEE J. Select. Topics Quantum Electron. 2012, 18, 1192.