Area selective molecular layer deposition of polyurea films

ACS Applied Materials and Interfaces

Volumn 5, Issue 24, 2013, Pages 13391-13396

  Prasittichai, Chaiya ^a   Zhou, Han ^b   Bent, Stacey F ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

Microcontact printing; Molecular layer deposition (MLD); Organic thin film; Patterned organic structures; Polyurea; Self assembled monolayer

Indexed keywords

MICRO CONTACT PRINTING; MOLECULAR LAYER DEPOSITIONS (MLD); ORGANIC STRUCTURES; ORGANIC THIN FILMS; POLYUREAS;

ATOMIC LAYER DEPOSITION; AUGER ELECTRON SPECTROSCOPY; ELECTRON DEVICE MANUFACTURE; SELF ASSEMBLED MONOLAYERS; SILICON; SILICON WAFERS; THIN FILMS;

DEPOSITION;

EID: 84891375141     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am4043195     Document Type: Article

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