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Volumn 214, Issue , 2014, Pages 7-11

Atomic and molecular layer deposition for surface modification

(8) Vähä Nissi, Mika a Sievänen, Jenni a Salo, Erkki a Heikkilä, Pirjo a Kenttä, Eija a Johansson, Leena Sisko b Koskinen, Jorma T a Harlin, Ali a

a VTT TECHNICAL RESEARCH CENTRE OF FINLAND (Finland)

b AALTO UNIVERSITY (Finland)

Author keywords

Adhesion; Atomic layer deposition; Hybrid; Inorganic; Surface treatment

Indexed keywords

ADHESION; ATOMS; DEPOSITION; POLYMER FILMS; SURFACE REACTIONS; SURFACE TREATMENT;

DEPOSITION CYCLES; FILM COMPOSITION; HYBRID; INORGANIC; INORGANIC OXIDES; MOLECULAR LAYER DEPOSITION; MOLECULAR RESOLUTION; SURFACE CHARACTERISTICS;

ATOMIC LAYER DEPOSITION;

EID: 84901025417 PISSN: 00224596 EISSN: 1095726X Source Type: Journal
DOI: 10.1016/j.jssc.2013.11.040 Document Type: Article

Times cited : (17)

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