3D hierarchical architectures based on self-rolled-up silicon nitride membranes

Nanotechnology

Volumn 24, Issue 47, 2013, Pages

  Froeter, Paul ^a   Yu, Xin ^a   Huang, Wen ^a   Du, Frank ^a   Li, Moyang ^a   Chun, Iksu ^a   Kim, Seung Hyun ^a   Hsia, Kuen J ^a   Rogers, John A ^a   Li, Xiuling ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBE ARRAY; FUNCTIONAL STRUCTURE; HIERARCHICAL ARCHITECTURES; PASSIVE ELECTRONIC COMPONENTS; SACRIFICIAL LAYER ETCHINGS; SILICON NITRIDE MEMBRANE; STRESS ENGINEERING; TUBULAR ARCHITECTURE;

ARCHITECTURE; SILICON NITRIDE;

THREE DIMENSIONAL;

EID: 84887586868     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/24/47/475301     Document Type: Article

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