The penetration of acoustic cavitation bubbles into micrometer-scale cavities

Ultrasonics

Volumn 67, Issue , 2016, Pages 190-198

  Vaidya, Haresh Anant ^a   Ertunç, Özgür ^b   Lichtenegger, Thomas ^a   Delgado, Antonio ^a   Skupin, Andreas ^c  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b OZYEGIN UNIVERSITY   (Turkey)

^c ATOTECH DEUTSCHLAND GMBH   (Germany)

Author keywords

Acoustic cavitation; Bubble dynamics; Mass transfer; Microvias; Ultrasound

Indexed keywords

ASPECT RATIO; CAVITATION; HIGH SPEED PHOTOGRAPHY; MASS TRANSFER; MICROMETERS; POLYCHLORINATED BIPHENYLS; ULTRASONICS;

ACOUSTIC CAVITATIONS; ACOUSTIC MEASUREMENTS; BUBBLE DYNAMICS; CAVITATION BUBBLE CLUSTERS; ENHANCING MASS TRANSFER; MICROVIAS; ULTRASOUND EXCITATION; ULTRASOUND RADIATION;

OSCILLATING FLOW;

EID: 84952683377     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultras.2015.12.009     Document Type: Article

References (41)

1. Y. Tsukada, S. Tsuchida, Y. Mashimoto, Surface laminar circuit packaging, in: Electron. Components Technol. Conf. 1992. Proceedings., 42nd, 1992, pp. 22-27. http://dx.doi.org/10.1109/ECTC.1992.204177.
2. M. Asai, New packaging substrate technology, Ibss (interpenetrating polymer network build up structure system), in: Electron. Packag. Mater. Sci. IX, Vol. 445 of MRS Online Proceedings Library, 1996. http://dx.doi.org/10.1557/PROC-445-117. < http://journals.cambridge.org/article-S194642740022383X >
3. M. Stampanoni, and W. Schmidt Modern interconnect solutions for miniaturized medical electronic devices SPIE Proc. Ser. Society of Photo-Optical Instrumentation Engineers 2000 Denver 526 530 < http://cat.inist.fr/?aModele=afficheN&cpsidt=1018124 >
4. J.H. Lau, and C. Chang An overview of microvia technology Circ. World 26 2 2000 22 32 10.1108/03056120010310891
5. D.B. Noddin, E. Swenson, Y. Sun, Solid state UV-laser technology for the manufacture of high performance organic modules, in: Electron. Components &; Technol. Conf. 1998. 48th IEEE, 1998, pp. 822-827. http://dx.doi.org/10.1109/ECTC.1998.678802.
6. M. Owen, E. Roelants, and J.V. Puymbroeck Laser drilling of blind holes in FR4/glass Circ. World 24 1 1998 45 49 10.1108/030561201998000008
7. S. Raman, J.H. Jeong, S.J. Kim, B. Sun, and K. Park Laser (UV) microvia application in cellular technology Circ. World 26 1 2000 11 15 10.1108/03056120010302142
8. T. Kobayashi, J. Kawasaki, K. Mihara, and H. Honma Via-filling using electroplating for build-up PCBs Electrochim. Acta 47 2001 85 89 10.1016/S0013-4686(01)00592-8
9. M. Lefebvre, G. Allardyce, M. Seita, H. Tsuchida, M. Kusaka, and S. Hayashi Copper electroplating technology for microvia filling Circ. World 29 2003 9 14 10.1108/03056120310454943
10. S. Miura, and H. Honma Advanced copper electroplating for application of electronics Surf. Coat. Technol. 169-170 2003 91 95 10.1016/S0257-8972(03)00165-8
11. W.-P. Dow, H.-S. Huang, M.-Y. Yen, and H.-C. Hua ng Influence of convection-dependent adsorption of additives on microvia filling by copper electroplating J. Electrochem. Soc. 152 2005 C425 10.1149/1.1901670
12. K. Feng, T. Spencer, J. Watkowski, Integrated metallization system for high density interconnects and modified semi additive processing, in: Microsystems, Packag. Assem. Circuits Technol. Conf. (IMPACT), 2013 8th Int., 2013, pp. 241-244. http://dx.doi.org/10.1109/IMPACT.2013.6706700.
13. S. Castaldi, D. Fritz, and R. Schaeffer Limits of copper plating in high aspect ratio microvias Circ. World 25 1999 35 40 10.1108/03056129910258324
14. N. Strusevich, M. Desmulliez, E. Abraham, D. Flynn, T. Jones, M. Patel, and C. Bailey Electroplating for high aspect ratio vias in PCB manufacturing: enhancement capabilities of acoustic streaming Adv. Manuf. 1 3 2013 211 217 10.1007/s40436-013-0039-9
15. J. Kaufmann, M. Desmulliez, Y. Tian, D. Price, M. Hughes, N. Strusevich, C. Bailey, C. Liu, and D. Hutt Megasonic agitation for enhanced electrodeposition of copper Microsyst. Technol. 15 8 2009 1245 1254 10.1007/s00542-009-0886-2
16. N. Ibl Nomenclature for transport phenomena in electrolytic systems Pure Appl. Chem. 53 1981 1827 10.1351/pac198153101827
17. P.C. Andricacos, C. Uzoh, J.O. Dukovic, J. Horkans, and H. Deligianni Damascene copper electroplating for chip interconnections IBM J. Res. Dev. 42 5 1998 567 574 10.1147/rd.425.0567
18. S. Elder Cavitation microstreaming J. Acoust. Soc. Am. 31 1 1959 54 64
19. R. Manasseh, P. Tho, A. Ooi, K. Petkovic-Duran, and Y. Zhu Cavitation microstreaming and material transport around microbubbles Phys. Proc. 3 1 2010 427 432
20. D.H. Trevena The behaviour of liquids under tension Contemp. Phys. 8 2 1967 185 195 10.1080/00107516708205506
21. D.E. Yount Skins of varying permeability: a stabilization mechanism for gas cavitation nuclei J. Acoust. Soc. Am. 65 6 1979
22. T. Leighton The Acoustic Bubble 1994 Academic Press
23. H. Vaidya, O. Ertunç, T. Lichtenegger, J. Hachmann, A. Delgado, and A. Skupin High-speed visualization of acoustically excited cavitation bubbles in a cluster near a rigid boundary J. Visual. 2015 1 10 10.1007/s12650-015-0280-3
24. P.V.C. Hough Method and means for recognizing complex patterns US Patent 3 1962 069 654
25. R.O. Duda, and P.E. Hart Use of the Hough transformation to detect lines and curves in pictures Commun. ACM 15 1 1972 11 15
26. J. Illingworth, and J. Kittler A survey of the Hough transform Comput. Vision, Graph. Image Process. 44 1 1988 87 116 10.1016/S0734-189X
27. T. Peng, Detect circles with various radii in grayscale image via Hough transform, 2005. < http://www.mathworks.de/matlabcentral/fileexchange/9168-detect-circles-with-various-radii-in-grayscale-image-via-hough-transform >.
28. A. Eller, and H.G. Flynn Generation of subharmonics of order one half by bubbles in a sound field J. Acoust. Soc. Am. 46 3B 1969 722 727 10.1121/1.1911753
29. L.A. Crum Measurements of the growth of air bubbles by rectified diffusion J. Acoust. Soc. Am. 68 1 1980 203 211
30. L.A. Crum Acoustic cavitation series: part five rectified diffusion Ultrasonics 22 5 1984 215 223 10.1016/0041-624X(84)90016-7
31. E.A. Neppiras Acoustic cavitation Phys. Rep. 61 3 1980 159 251 10.1016/0370-1573(80)90115-5
32. N. Bremond, M. Arora, C.-D. Ohl, and D. Lohse Controlled multibubble surface cavitation Phys. Rev. Lett. 96 2006 224501
33. D. Krefting, Untersuchung von einzel- und mehrblasensystemen in akustischen resonatoren, Ph.D. Thesis, Georg-August-Universität, Göttingen, 2003.
34. V. Bjerkenes Fields of Force 1906 Columbia University Press New York
35. F. Blake Bjerknes Forces in Stationary Sound Fields J. Acoust. Soc. Am. 21 5 1949 551
36. A. Eller Force on a bubble in a standing acoustic wave J. Acoust. Soc. Am. 43 1 1968 170 171
37. Leighton Primary Bjerknes forces Eur. J. Phys. 11 1990 47 50
38. N.A. Pelekasis, A. Gaki, A. Doinikov, and J.A. Tsamopoulos Secondary Bjerknes forces between two bubbles and the phenomenon of acoustic streamers J. Fluid Mech. 500 2004 313 347
39. M. Minnaert On musical air-bubbles and the sounds of running water Philos. Mag. Ser. 716 104 1933 235 248 10.1080/14786443309462277
40. S.D. Howkins Measurements of the resonant frequency of a bubble near a rigid boundary J. Acoust. Soc. Am. 37 3 1965 504 508
41. J.E. Blue Resonance of a bubble on an infinite rigid boundary J. Acoust. Soc. Am. 41 2 1967 369 372