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Volumn 1, Issue 3, 2013, Pages 211-217

Electroplating for high aspect ratio vias in PCB manufacturing: Enhancement capabilities of acoustic streaming

Author keywords

Acoustic streaming; Electronics manufacturing; Electroplating; High aspect ratio microvia; Megasonic agitation; Numerical modelling

Indexed keywords


EID: 84899842818     PISSN: 20953127     EISSN: 21953597     Source Type: Journal    
DOI: 10.1007/s40436-013-0039-9     Document Type: Article
Times cited : (13)

References (14)
  • 3
    • 30644480323 scopus 로고    scopus 로고
    • Curvature enhanced adsorbate coverage model for electrodeposition
    • Moffat TP, Wheeler D, Kim SK, Josell D (2006) Curvature enhanced adsorbate coverage model for electrodeposition. J Electrochem Soc 153(2): C127-C132.
    • (2006) J Electrochem Soc , vol.153 , Issue.2
    • Moffat, T.P.1    Wheeler, D.2    Kim, S.K.3    Josell, D.4
  • 4
    • 0037410930 scopus 로고    scopus 로고
    • The scaling of acoustic streaming for application in micro-fluidic devices
    • Frampton KD, Martin SE, Minor K (2003) The scaling of acoustic streaming for application in micro-fluidic devices. Appl Acoust 64: 681-692.
    • (2003) Appl Acoust , vol.64 , pp. 681-692
    • Frampton, K.D.1    Martin, S.E.2    Minor, K.3
  • 6
    • 33847064747 scopus 로고    scopus 로고
    • Numerical simulation of the current, potential and concentration distributions along the cathode of a rotating cylinder hull cell
    • Low CTJ, Roberts EPL, Walsh FC (2007) Numerical simulation of the current, potential and concentration distributions along the cathode of a rotating cylinder hull cell. Electrochim Acta 52: 3831-3840.
    • (2007) Electrochim Acta , vol.52 , pp. 3831-3840
    • Low, C.T.J.1    Roberts, E.P.L.2    Walsh, F.C.3
  • 7
    • 0038178132 scopus 로고    scopus 로고
    • Modeling superconformal electrodeposition using the level set method
    • Wheeler D, Josell D, Moffat TP (2003) Modeling superconformal electrodeposition using the level set method. J Electrochem Soc 150(5): C302-C310.
    • (2003) J Electrochem Soc , vol.150 , Issue.5
    • Wheeler, D.1    Josell, D.2    Moffat, T.P.3
  • 12
    • 0033168364 scopus 로고    scopus 로고
    • Roles of cavitation and acoustic streaming in megasonic cleaning
    • Gale GW, Busnaina AA (1999) Roles of cavitation and acoustic streaming in megasonic cleaning. Part Sci Technol 17: 229-238.
    • (1999) Part Sci Technol , vol.17 , pp. 229-238
    • Gale, G.W.1    Busnaina, A.A.2
  • 13
    • 0036530979 scopus 로고    scopus 로고
    • Enhanced transport by acoustic streaming in deep trench-like cavities
    • Nilson RH, Griffiths SK (2002) Enhanced transport by acoustic streaming in deep trench-like cavities. J Electrochem Soc 149(4): G286-G296.
    • (2002) J Electrochem Soc , vol.149 , Issue.4
    • Nilson, R.H.1    Griffiths, S.K.2
  • 14
    • 49949087744 scopus 로고    scopus 로고
    • Fabrication HARMS by using megasonic assisted electroforming
    • Liu G, Huang X, Xiong Y, Tian Y (2008) Fabrication HARMS by using megasonic assisted electroforming. Microsyst Technol 14: 122-1223.
    • (2008) Microsyst Technol , vol.14 , pp. 122-1223
    • Liu, G.1    Huang, X.2    Xiong, Y.3    Tian, Y.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.