90 MHz nanomechanical structures fabricated by stencil deposition and dry etching

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 883-886

  Kim, G M ^a   Van Den Boogaart, M A F ^a   Kawai, S ^b   Kawakatsu, H ^b   Brugger, J ^a  

^a EPFL   (Switzerland)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Atomic force microscopy; Dry etching; Fabrication; Lithography; Nanoelectromechanical systems; Nanoscale devices; Nanostructures; Resonance; Resonant frequency; Silicon compounds

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; DEPOSITION; FABRICATION; LITHOGRAPHY; MICROSYSTEMS; NANOSTRUCTURES; NATURAL FREQUENCIES; NEMS; RESONANCE; SHOTCRETING; SILICON COMPOUNDS; SOLID-STATE SENSORS; TRANSDUCERS;

HIGH RESONANCE FREQUENCY; LOCAL DEPOSITION; NANOMECHANICAL; NANOMECHANICAL STRUCTURE; NANOSCALE DEVICE; RESONANCE FREQUENCIES; RESONATING ELEMENTS; SIMPLE METHOD;

DRY ETCHING;

EID: 84944720068     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215616     Document Type: Conference Paper

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