Theory and New Applications of Ex Situ Lift Out

Microscopy and Microanalysis

Volumn 21, Issue 4, 2015, Pages 1034-1048

  Giannuzzi, Lucille A ^a   Yu, Zhiyang ^b   Yin, Denise ^b   Harmer, Martin P ^b   Xu, Qiang ^c   Smith, Noel S ^d   Chan, Lisa ^e   Hiller, Jon ^e   Hess, Dustin ^f   Clark, Trevor ^f  

^a EXpressLO LLC   (United States)

^b Lehigh University   (United States)

^c DENSsolutions   (Netherlands)

^d and Swallowing   (United States)

^e Chemin Départemental 56   (United States)

^f PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

ex situ lift out; FIB; Pick Place; specimen preparation; TEM

Indexed keywords

EID: 84938362939     PISSN: 14319276     EISSN: 14358115     Source Type: Journal    
DOI: 10.1017/S1431927615013720     Document Type: Article

References (45)

1. ADAMSON, A.W. & GAST, A.P. (1997). Physical Chemistry of Surfaces, 6th ed. New York, NY: Wiley-Interscience.
2. ALLARD, L.F., BIGELOW, W.C., JOSE-YACAMAN, M., NACKASHI, D.P., DAMIANO, J.&MICK, S.E. (2009). A new MEMS-based system for ultra-high resolution imaging at elevated temperatures. Microsc Res Tech 72, 208-215.
3. BASSIM, N., SCOTT, K. & GIANNUZZI, L.A. (2014). Recent advances in focused ion beam technology and applications. MRS Bull 39, 317-325.
4. BROWN, K.T. & FLAMING, D.G. (Eds.) (1986). Advanced Micropipette Techniques for Cell Physiology. Chichester: JohnWiley & Sons Ltd.
5. CHAN, L., HILLER, J.M. & GIANNUZZI, L.A. (2014). Ex situ lift out of PFIB prepared site specific specimens. ISTFA, ASM International, 9-13 November, Houston, pp. 283-286.
6. CHEN, G., HUANG, X. & WANG, M. (2005). Research on vacuum gripper based on fuzzy control for micromanipulators. J Control Theory Appl 3, 295-301.
7. CODOUREY, A., RODRIGUEZ, M. & PAPPAS, I. (1997). A task-oriented teleoperation system for assembly in the microworld. Proceedings of ICAR'97: International Conference on Advanced Robotics, Monterey, CA, USA, July 7-9.
8. DELOBBE, A., SALORD, O., HRNCIR, T., DAVID, A., SUDRAUD, P. & LOPOUR, F. (2014). High speed TEM sample preparation by Xe FIB. Microsc Microanal 20(Suppl 3), 298-299.
9. DUCHAMP, M., XU, Q. & DUNIN-BORKOWSKI, R.E. (2014). Convenient preparation of high-quality specimens for annealing experiments in the transmission electron microscope. Microsc Microanal 20, 1638-1645.
10. FERRYMAN, A.C., FULGHUM, J.E., GIANNUZZI, L.A. & STEVIE, F.A. (2002). XPS analysis of FIB-milled Si. Surf Interface Anal 33, 907-913.
11. GAZDA, J., DUARTE, J. & DABY-MERRILL, F. (2010). Twice flipped-avoiding milling curtains in FIB prepared TEM specimens of nano-electronics devices. Microsc Microanal 12(2), 230-231.
12. GIANNUZZI, L.A. (2012a). EXpressLO for fast and versatile FIB specimen preparation. Microsc Microanal 18(2), 632-633.
13. GIANNUZZI, L.A. (2012b). Routine backside FIB milling with EXpressLO. ISTFA, pp. 388-390.
14. GIANNUZZI, L.A. (2013). Enhancing ex-situ lift out with EXpressLO. Microsc Microanal 19(2), 906-907.
15. GIANNUZZI, L.A. (2014a). Method and apparatus for ex-situ lift out specimen preparation. US Patent No. 8,740,209, June 3.
16. GIANNUZZI, L.A. (2014b). Method for ex-situ lift out specimen preparation. US Patent No. 8,789,826, 11-15 November, Phoenix.
17. GIANNUZZI, L.A., DROWN, J.L., BROWN, S.R., IRWIN, R.B. & STEVIE, F.A. (1997). Focused ion beam milling and micromanipulation lift out for site specific cross-section TEM specimen preparation. Mater Res Soc Symp Proc 480, 18-27.
18. GIANNUZZI, L.A. & SMITH, N.S. (2011). TEM specimen preparation with plasma FIB Xe+ Ions. Microsc Microanal 17(2), 646-647.
19. GIANNUZZI, L.A. & SMITH, N.S. (2014). Ex situ lift out of PFIB prepared TEM specimens. Microsc Microanal 20(Suppl 3), 340-341.
20. GIANNUZZI, L.A. & STEVIE, F.A. (Eds.) (2005). Introduction to Focused Ion Beams: Theory, Techniques and Practice. New York, NY: Springer.
21. HARLOW, W., GHASSEM, H. & TAHERI, M.L. (2014). In-situ TEM study of the corrosion behavior of Zry-4. Microsc Microanal 20(Suppl 3), 1602-1603.
22. HERLINGER, L.R., CHEVACHAROENKUL, S. & ERWIN, D.C. (1996). TEM sample preparation using a focused ion beam and a probe manipulator. 22nd International Symposium for Testing and Failure Analysis, ASM International, 18-22 November, Los Angeles, pp. 199-205.
23. JIRUSE, J., HRNCIR, T., LOPOUR, F., ZADRAZIL, M., DELOBBE, A. & SALORD, O. (2012). Combined plasma FIB-SEM. Microsc Microanal 18(2), 652-653.
24. KELLEY, R.D., SONG, K., VAN LEER, B., WALL, D. & KWAKMAN, L. (2013). Xe+ FIB milling and measurement of amorphous silicon damage. Microsc Microanal 19(2), 862-863.
25. LANGFORD, R.M. & PETFORD-LONG, A.K. (2001). Broad ion beam milling of focused ion beam prepared transmission electron microscopy cross sections for high resolution electron microscopy. J Vac Sci Technol A 19(3), 982-985.
26. LEE, J.C. & LEE, B.H. (2005). The versatile application for in-situ lift out TEM sample preparation by micromanipulator and nanomotor. ISTFA, 6-10 November, San Jose, pp. 322-326.
27. LEITE, F.L., BUENO, C.C., DA RÓZ, A.L., ZIEMATH, E.C. & OLIVEIRA, O.N. Jr. (2012). Theoretical models for surface forces and adhesion and their measurement using atomic force microscopy. Int J Mol Sci 13, 12773-12856.
28. LESLIE, A.J., PEY, K.L., SIM, K.S., BEH, M.T.F.&GOH, G.P. (1995). TEM sample preparation using FIB: Practical problems and artifacts. 21st International Symposium for Testing and Failure Analysis, ASM International, 5-10 November, Santa Clara, pp. 353-362.
29. LUE, J.L., CHANG, T.F., CHEN, J.C. & WANG, T. (2007). A method for precise TEM sample preparation using the FIB ex-situ lift out technique with a modified copper ring in semiconductor devices. AIP Conf Proc 931, 507-511.
30. O'KANE, D.F. & MITTAL, K.L. (1974). Plasma cleaning of metal surfaces. J Vac Sci Technol 11, 567-569.
31. OVERWIJK, M.H.F., VAN DEN HEUVEL, F.C. & BULLE-LIEUWMA, C.W.T. (1993). Novel scheme for the preparation of transmission electron microscopy specimens with a focused ion beam. J Vac Sci Technol B 11, 2021-2024.
32. PATTERSON, R.J., MAYER, D.,WEAVER, L. & PHANEUF, M.W. (2002). "HBar Lift-Out" and "Plan-View Lift-Out": Robust, re-thinnable FIBTEM preparation for ex-situ cross-sectional and plan-view FIB specimen preparation. Microsc Microanal 8(2), 566CD-567CD.
33. PETROVIC, D., POPOVIC, G., CHATZITHEODORIDIS, E., DEL MEDICO, O., ALMANSA, A., SÜMECZ, F., BRENNER, W. & DETTER, H. (2002). Gripping tools for handling and assembly of microcomponents. 23rd International Conference on Microelectronics, IEEE, 12-15 May, Yugoslavia, pp. 247-250.
34. PRASAD, S.V., MICHAEL, J.R. & CHRISTENSON, T.R. (2003). EBSD studies on wear-induced subsurface regions in LIGA nickel. Scripta Mater 48, 255-260.
35. PRASAD, S.V., SCHARF, T.W., KOTULA, P.G., MICHAEL, J.R. & CHRISTENSON, T.R. (2009). Application of diamond-like nanocomposite tribological coatings on LIGA microsystem parts. J Microelectromech Syst 18, 695-704.
36. RAJSIRI, S. (2002). Redeposition effects on FIB milled surfaces. MS Thesis, University of Central Florida, Orlando.
37. RAJSIRI, S., KEMPSHALL, B.W., SCHWARZ, S.M. & GIANNUZZI, L.A. (2002). FIB damage in silicon: Amorphization or redeposition? Microsc Microanal 8(2), 50-51.
38. ROSSIE, B.B., MILLS, R.M., ANDERSON, S.D., ANTONELL, M. & STEVIE, F.A. (2002). Auger analysis of focused ion beam prepared lift out specimens. Microsc Microanal 8(2), 556-557.
39. ROSSIE, B.B., SHORNER, T.L., BROWN, S.R., ANDERSON, S.D., JAMISON, M. M. & STEVIE, F.A. (2001). A method for thinning FIB prepared TEM specimens after lift out. Microsc Microanal 7(2), 940-941.
40. SCHWARZ, S.M., KEMPSHALL, B.W., GIANNUZZI, L.A.&MCCARTNEY, M.R. (2003). Avoiding the curtaining effect: backside milling by FIB INLO. Micros Microanal 9(2), 116-117. doi: 10.1017/ S1431927603441032.
41. SMITH, N.S., NOTTE, J.A. & STEELE, A.V. (2014) Advances in source technology for focused ion beam instruments. MRS Bull 39, 329-335.
42. STEVIE, F.A., VARTULI, C.B., GIANNUZZI, L.A., SHOFNER, T.L., BROWN, S.R., ROSSIE, B., HILLION, F., MILLS, R.H., ANTONELL, M., IRWIN, R.B. & PURCELL, B.M. (2001). Application of focused ion beam lift out specimen preparation to TEM, SEM, STEM, AES and SIMS analysis. Surf Interface Anal 31, 345-351.
43. TESCH, P., SMITH, N., MARTIN, N. & KINION, D. (2008). High current focused ion beam instrument for destructive physical analysis applications. ISTFA, 2-6 November, Portland, pp. 7-13.
44. YOUNG, N.P., VAN HUIS, M.A., ZANDBERGEN, H.W.,XU, H. & KIRKLAND, A.I. (2010). Transformations of gold nanoparticles investigated using variable temperature high resolution transmission electron microscopy. Ultramicroscopy 110, 506-516.
45. ZESCH, W., BRUNNER, M. & WEBER, A. (1997). Vacuum tool for handling microobjects with a nanorobot. IEEE Int Conf Robot Autom 2, 1761-1766.