High current focused ion beam instrument for destructive physical analysis applications

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2008, Pages 7-13

  Tesch, Paul ^a   Smith, Noel ^a   Martin, Noel ^a   Kinion, Doug ^a  

^a Oregon Physics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 63549130581     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1361/cp2008istfa007     Document Type: Conference Paper

References (3)

1. Orloff, J, et al, High Resolution Focused Ion Beams, Kluwar Academic/ Plenum Publishers (New York, 2003).
2. Thonemann, P. C, Progress in Nuclear Physics, Pergamon Press (London, 1953), pp. 219.
3. Ziegler, J. F. et al, SRIM The Stopping and Range of Ions in Matter. SRIM Co, (2008)