Fabrication of servo-integrated template for 1.5 Teradot/inch 2 bit patterned media with block copolymer directed assembly

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 13, Issue 3, 2014, Pages

  Yang, Xiaomin ^a   Xiao, Shuaigang ^a   Hsu, Yautzong ^a   Wang, Hongying ^a   Hwu, Justin ^a   Steiner, Philip ^a   Wago, Koichi ^a   Lee, Kim ^a   Kuo, David ^a  

^a SEAGATE TECHNOLOGY   (United States)

Author keywords

bit patterned media; block copolymer; directed self assembly; imprint lithography; magnetic recording.; template fabrication

Indexed keywords

BLOCK COPOLYMERS; CHROMIUM ALLOYS; COBALT ALLOYS; ETCHING; ION BEAMS; MAGNETIC RECORDING; NANOIMPRINT LITHOGRAPHY; PHOTOLITHOGRAPHY; PLATINUM ALLOYS; TERNARY ALLOYS;

ARBITRARY PATTERNS; BIT-PATTERNED MEDIA; BIT-PATTERNED MEDIA (BPM); DIRECTED SELF-ASSEMBLY; IMPRINT LITHOGRAPHY; INTEGRATED TEMPLATE; STANDARD DEVIATION; TEMPLATE FABRICATION;

FABRICATION;

EID: 84938131322     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.JMM.13.3.031307     Document Type: Article

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