Fabrication of 5 Tdot/in.2 bit patterned media with servo pattern using directed self-assembly

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 30, Issue 6, 2012, Pages

  Kihara, Naoko ^a   Yamamoto, Ryousuke ^a   Sasao, Norikatsu ^a   Shimada, Takuya ^a   Yuzawa, Akiko ^a   Okino, Takeshi ^a   Ootera, Yasuaki ^a   Kamata, Yoshiyuki ^a   Kikitsu, Akira ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AREAL DENSITIES; BIT-PATTERNED MEDIA; DIRECTED SELF-ASSEMBLY; DOT ARRAY; DOT PATTERNS; FLORY-HUGGINS INTERACTION PARAMETER; HEXAGONAL PATTERN; HIGH SOLUBILITY; LATTICE SPACING; LOW MOLECULAR WEIGHT; N-METHYLPYRROLIDONE; SEPARATION ENERGY; SERVO PATTERN; SOLVENT ANNEALING; THERMALLY TREATED FILMS; VORONOI DIAGRAMS;

ANNEALING; MICROCHANNELS; PHASE SEPARATION; STYRENE; VAPORS;

AUTOMOBILE MANUFACTURE;

EID: 84870362386     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.4763356     Document Type: Article

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