Step and flash imprint lithography for manufacturing patterned media

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 2, 2009, Pages 573-580

  Schmid, Gerard M ^a   Miller, Mike ^a   Brooks, Cynthia ^a   Khusnatdinov, Niyaz ^a   Labrake, Dwayne ^a   Resnick, Douglas J ^a   Sreenivasan, S V ^a   Gauzner, Gene ^b   Lee, Kim ^b   Kuo, David ^b   Weller, Dieter ^b   Yang, Xiaomin ^c  

^a MOLECULAR IMPRINTS INC   (United States)

^b SEAGATE TECHNOLOGY   (United States)

^c SEAGATE RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGES; FUTURE GENERATIONS; GROWING DEMANDS; HARD DISK DRIVES; HARD DISK SUBSTRATES; HARD DISKS; HARD DRIVES; HIGH-VOLUME MANUFACTURING; MAGNETIC MEDIAS; PATTERNED MEDIAS; RESIDUAL LAYERS; STEP-AND-FLASH IMPRINT LITHOGRAPHIES; STORAGE DENSITIES; TECHNOLOGY SHIFTS;

DISKS (MACHINE COMPONENTS); DISKS (STRUCTURAL COMPONENTS); MAGNETIC DISK STORAGE; NANOIMPRINT LITHOGRAPHY; SUBSTRATES;

HARD DISK STORAGE;

EID: 64549126998     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3081981     Document Type: Article

References (15)

1. V. Poulsen, U.S. Patent No. 822,222 (8 July 1899).
2. D. Weller and M. F. Doerner, Annu. Rev. Mater. Sci. 0084-6600 10.1146/annurev.matsci.30.1.611 30, 611 (2000).
3. B. M. Chen, T. H. Lee, K. Peng, and V. Venkataramanan, Hard Disk Drive Servo Systems, 2nd ed. (Springer, New York, 2007).
4. T. Oikawa, M. Nakamura, H. Uwazumi, T. Shimatsu, H. Muraoka, and Y. Nakamura, IEEE Trans. Magn. 0018-9464 10.1109/TMAG.2002.801791 38, 1976 (2002).
5. S. Y. Chou, Proc. IEEE 0018-9219 10.1109/5.573754 85, 652 (1997).
6. C. A. Ross, Annu. Rev. Mater. Res. 1531-7331 10.1146/annurev.matsci.31.1. 203 31, 203 (2001).
7. D. J. Resnick, J. Microlithogr., Microfabr., Microsyst. 1537-1646 10.1117/1.1508410 1, 284 (2002).
8. X. Yang, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2798711 25, 2202 (2007).
9. M. Colburn, Proc. SPIE 0277-786X 10.1117/12.351155 3676, 379 (1999).
10. I. Yoneda, S. Mikami, T. Ota, T. Koshiba, M. Ito, T. Nakasugi, and T. Higashiki, Proc. SPIE 6921, 14 (2008).
11. M. Miller, C. Brooks, D. Lentz, G. Doyle, D. J. Resnick, and D. LaBrake, Proc. SPIE 6883, 68830D (2008). 0003-6951
12. M. Albrecht, C. T. Rettner, M. E. Best, and B. D. Terris, Appl. Phys. Lett. 0003-6951 10.1063/1.1630153 83, 4363 (2003).
13. Preliminary experiments have demonstrated template lifetimes exceeding 104 imprints (unpublished data).
14. M. Miller, G. M. Schmid, G. F. Doyle, E. D. Thompson, and D. J. Resnick, Microelectron. Eng. 0167-9317 10.1016/j.mee.2007.01.060 84, 885 (2007).
15. F. Hua, Nano Lett. 1530-6984 10.1021/nl048355u 4, 2467 (2004).