Directed self-assembly for high-density bit-patterned media fabrication using spherical block copolymers

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 12, Issue 3, 2013, Pages

  Xiao, Shuaigang ^a   Yang, Xiaomin ^a   Lee, Kim Y ^a   Hwu, Justin J ^a   Wago, Koichi ^a   Kuo, David ^a  

^a SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE MANUFACTURE; BLOCK COPOLYMERS; MAGNETIC STORAGE; NANOSTRUCTURED MATERIALS; QUARTZ; SELF ASSEMBLY; SILICONES;

BIT-PATTERNED MEDIA; BIT-PATTERNED MEDIA (BPM); DIRECTED SELF-ASSEMBLY; LITHOGRAPHY RESOLUTION; MAGNETIC STORAGE MEDIA; NANOIMPRINT MOLDS; PATTERN RESOLUTION; PATTERN TRANSFERS;

SPHERES;

EID: 84892725446     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.JMM.12.3.031110     Document Type: Article

References (21)

1. C. A. Ross, "Patterned magnetic recording media," Annu. Rev. Mater. Res. 31, 203-235 (2001). (Pubitemid 33073850)
2. W. A. Challener et al., "Heat-assisted magnetic recording by a near-field transducer with efficient optical energy transfer," Nat. Photon. 3(4), 220-224 (2009).
3. B. D. Terris and T. Thomson, "Nanofabricated and self-assembled magnetic structures as data storage media," J. Phys. D 38(12), R199-R222 (2005). (Pubitemid 40883002)
4. H. J. Richter et al., "Recording potential of bit-patterned media," Appl. Phys. Lett. 88(22), 222512-222514 (2006).
5. D. J. C. Herr, "Update on the extensibility of optical patterning via directed self-assembly," Future Fab. Intl. 20, 82-86 (2006).
6. J. Bang et al., "Block copolymer nanolithography: translation of molecular level control to nanoscale patterns," Adv. Mater. 21(47), 4769-4792 (2009).
7. M. Park et al., "Block copolymer lithography: periodic arrays of 1011 holes in 1 square centimeter," Science 276(5317), 1401-1404 (1997). (Pubitemid 27235405)
8. C. B. Tang et al., "Evolution of block copolymer lithography to highly ordered square arrays," Science 322(5900), 429-432 (2008).
9. S. Park et al., "Macroscopic 10-terrabit-per-square-inch arrays from block copolymers with lateral order," Science 323(5917), 1030-1033 (2009).
10. S. O. Kim et al., "Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates," Nature 424(6947), 411-414 (2003). (Pubitemid 36917485)
11. J. Y. Cheng et al., "Dense self-assembly on sparse chemical patterns: rectifying and multiplying lithographic patterns using block copolymers," Adv. Mater. 20(16), 3155-3158 (2008).
12. R. Ruiz et al., "Density multiplication and improved lithography by directed block copolymer assembly," Science 321(5891), 936-939 (2008).
13. I. Bita et al., "Graphoepitaxy of self-assembled block copolymers on two-dimensional periodic patterned templates," Science 321(5891), 939-943 (2008).
14. S. Xiao et al., "A novel approach to addressable 4 teradot/in2 patterned media," Adv. Mater. 21(24), 2516-2519 (2009).
15. R. A. Segalman et al., "Graphoepitaxy of spherical domain block copolymer films," Adv. Mater. 13(15), 1152-1155 (2001). (Pubitemid 32798071)
16. P. A. R. Delgadillo et al., "Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment," J. Microlith. Microfab. 11(3), 031302 (2012)
17. J. Y. Cheng et al., "Nanostructure engineering by templated selfassembly of block copolymers," Nat. Mater. 3(11), 823-828 (2004).
18. S. Xiao et al., "Graphoepitaxy of cylinder-forming block copolymers for use as templates to pattern magnetic metal dot arrays," Nanotechnology 16(7), S324-S329 (2005). (Pubitemid 40878498)
19. R. Gronheid et al., "Frequency multiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern," J. Micro/Nanolithog. MEMS MOEMS 11(3), 031303 (2012).
20. Y. Kamata et al., "Fabrication of ridge-and-groove servo pattern consisting of self-assembled dots for 2.5 tb/in 2 bit patterned media," IEEE Trans. Magn. 47(1), 51-54 (2011).
21. S. Xiao et al., "Aligned nanowires and nanodots by directed block copolymer assembly," Nanotechnology 22(30), 305302-305309 (2011).