Silicon nanoparticle formation depending on the discharge conditions of an atmospheric radio-frequency driven microplasma with argon/silane/hydrogen gases

Journal of Physics D: Applied Physics

Volumn 48, Issue 31, 2015, Pages

  Barwe, B ^a   Riedel, F ^a   Cibulka, O E ^b   Pelant, I ^b   Benedikt, J ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b INSTITUTE OF PHYSICS   (Czech Republic)

Author keywords

atmospheric plasma; dynamic light scattering; microplasma jets; scanning electron microscopy; silane; silicon nanoparticles

Indexed keywords

ARGON; ATMOSPHERIC CHEMISTRY; DYNAMIC LIGHT SCATTERING; ELECTRIC FIELDS; ELECTROMAGNETIC WAVE SCATTERING; ELECTRON MICROSCOPY; FILAMENTS (LAMP); FLOW OF GASES; GAS MIXTURES; GASES; LIGHT SCATTERING; METAMATERIALS; NANOPARTICLES; NEGATIVE IONS; OPTICAL EMISSION SPECTROSCOPY; PARTICLE SIZE; PLASMA DENSITY; PLASMA DEVICES; RADIO WAVES; SCANNING ELECTRON MICROSCOPY; SILANES; SILICON;

ATMOSPHERIC PLASMAS; ATMOSPHERIC RADIO FREQUENCY; DISCHARGE CONDITIONS; HIGH-TIME RESOLUTION; INITIAL INFORMATION; MICRO-PLASMA JET; SILANE CONCENTRATIONS; SILICON NANOPARTICLES;

ELECTRIC DISCHARGES;

EID: 84937899612     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/48/31/314001     Document Type: Article

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