SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 140, Issue , 2015, Pages 60-66

Capillary origami of micro-machined micro-objects: Bi-layer conductive hinges

(4) Legrain, A a Berenschot, J W a Tas, N R a Abelmann, L a,b

a UNIVERSITY OF TWENTE (Netherlands)

b KIST Europe (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; PLATINUM; SILICON NITRIDE;

CAPILLARY FORCE; CONDUCTIVE ELECTRODES; DIFFERENT LAYERS; ELECTRONIC FUNCTIONALITY; FABRICATION YIELD; FOLDING PROCESS; PLASMA CLEANING; PLATINUM ELECTRODES;

HINGES;

EID: 84935027325 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2015.06.004 Document Type: Article

Times cited : (11)

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