Strain gauge factor and TCR of sputter deposited Pt thin films up to 850°C

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 1532-1535

  Fricke, Soeren ^a,b   Friedberger, Alois ^a   Mueller, Gerhard ^a   Seidel, Helmut ^b   Schmid, Ulrich ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b SAARLAND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM OXIDES; ELECTRO-MECHANICAL; GAS ATMOSPHERE; MEASUREMENT SETUP; PLATINUM THIN FILM; PT THIN FILMS; ROOM TEMPERATURE; STRAIN GAUGE FACTOR; STRAIN VALUES; TEMPERATURE DEPENDENT;

ALUMINA; OXIDE FILMS; PLATINUM; SENSORS; STRAIN GAGES; THIN FILMS;

ATMOSPHERIC TEMPERATURE;

EID: 67649921533     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716739     Document Type: Conference Paper

References (8)

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