Elastocapillary fabrication of three-dimensional microstructures

Applied Physics Letters

Volumn 97, Issue 1, 2010, Pages

  Van Honschoten, J W ^a   Berenschot, J W ^a   Ondaruhu T ^b   Sanders, R G P ^a   Sundaram, J ^a   Elwenspoek, M ^a   Tas, N R ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

^b CEMES CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARY FORCE; CAPILLARY PROPERTIES; DRIVING MECHANISM; EFFECTIVE MECHANISMS; FOLDING PROCESS; MICRO-FABRICATION TECHNIQUES; MICRO-OBJECTS; SMALL SCALE; SURFACE TENSION FORCE; THREE-DIMENSIONAL MICROSTRUCTURES; THREE-DIMENSIONAL OBJECT;

METALLOGRAPHIC MICROSTRUCTURE; SILICON NITRIDE; SURFACE TENSION;

THREE DIMENSIONAL;

EID: 77954707612     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3462302     Document Type: Article

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