Wafer level fabrication of single cell dispenser chips with integrated electrodes for particle detection

Journal of Micromechanics and Microengineering

Volumn 25, Issue 2, 2015, Pages

  Schoendube, Jonas ^a   Yusof, Azmi ^a   Kalkandjiev, Kiril ^a   Zengerle, Roland ^a   Koltay, Peter ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Biological cells; Cytometry; Drop on demand printing; Electrical impedance spectroscopy; Low temperature bonding

Indexed keywords

BONDING; DISPENSERS; DROPS; ELECTRIC IMPEDANCE; ELECTRIC IMPEDANCE MEASUREMENT; ELECTRODES; FABRICATION; MICROELECTRODES; MICROFLUIDICS; PARTICLE DETECTORS; PRINTING; SILICON WAFERS; TEMPERATURE;

BIOLOGICAL CELLS; CYTOMETRY; DROP-ON-DEMAND PRINTING; ELECTRICAL IMPEDANCE SPECTROSCOPY; LOW TEMPERATURE BONDING;

WAFER BONDING;

EID: 84922041643     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/25/2/025008     Document Type: Article

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