Fabrication of a dielectrophoretic chip with 3D silicon electrodes

Journal of Micromechanics and Microengineering

Volumn 15, Issue 3, 2005, Pages 494-500

  Iliescu, Ciprian ^a   Xu, Guo Lin ^a   Samper, Victor ^a   Tay, Francis E H ^a,b  

^a INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTROPHORETIC ELECTRODES; MICROFABRICATION; MICROFLUIDIC CHAMBERS; SIGNAL FREQUENCY;

CHANNEL FLOW; DIELECTRIC MATERIALS; ELECTRIC FIELD EFFECTS; ELECTRODES; ELECTROPHORESIS; NATURAL FREQUENCIES; PERMITTIVITY; SEMICONDUCTING SILICON;

MICROPROCESSOR CHIPS;

EID: 15544362224     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/3/009     Document Type: Article

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