One-step firing for electroded PZT thick films applied to MEMS

Smart Materials and Structures

Volumn 24, Issue 2, 2015, Pages

  Debeda H ^a   Clement P ^a,b   Llobet, E ^b   Lucat, C ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b UNIVERSITAT ROVIRA I VIRGILI   (Spain)

Author keywords

densification; free standing; MEMS; PZT; sacrificial layer; screen printing; thick film

Indexed keywords

ALUMINA; ALUMINUM OXIDE; DENSIFICATION; ELECTRODES; LEAD ZIRCONATE TITANATE; MEMS; NANOCANTILEVERS; PIEZOELECTRICITY; THICK FILMS;

DENSIFICATION PROCESS; ELECTROMECHANICAL BEHAVIOR; FREE-STANDING; PIEZOELECTRIC PROPERTY; PIEZOELECTRIC THICK FILMS; SACRIFICIAL LAYER; SACRIFICIAL LAYER METHOD; SCREEN PRINTING TECHNOLOGY;

SCREEN PRINTING;

EID: 84921770314     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/24/2/025020     Document Type: Article

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