Processing of graphite-based sacrificial layer for microfabrication of low temperature co-fired ceramics (LTCC)

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 560-567

  Birol, Hansu ^a   Maeder, Thomas ^a   Ryser, Peter ^a  

^a EPFL   (Switzerland)

Author keywords

Fabrication of microfluidic structures; LTCC; Permeability of LTCC; Sacrificial layer

Indexed keywords

FLUIDIC DEVICES; GRAPHITE; PERMSELECTIVE MEMBRANES; POWDERS; STRUCTURE (COMPOSITION);

FABRICATION OF MICROFLUIDIC STRUCTURES; LOW TEMPERATURE CO-FIRED CERAMICS (LTCC); PERMEABILITY OF LTCC; SACRIFICIAL LAYERS;

CERAMIC MATERIALS;

EID: 33745969533     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.009     Document Type: Article

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