Use of the longitudinal mode of screen-printed piezoelectric cantilevers coated with PEUT for toluene detection: Comparison with silicon cantilevers

Sensors and Actuators, B: Chemical

Volumn 187, Issue , 2013, Pages 198-203

  Debeda H ^a   Lakhmi, R ^a   Lucat, C ^a   Dufour, I ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

In plane vibrations; Longitudinal vibration mode; PEUT; Pzt cantilever; Thick layer; Toluene

Indexed keywords

ALUMINA; GOLD; NATURAL FREQUENCIES; PIEZOELECTRICITY; SCREEN PRINTING; SILICON; TOLUENE;

IN-PLANE VIBRATION; LONGITUDINAL VIBRATION MODES; PEUT; PZT CANTILEVERS; THICK LAYERS;

NANOCANTILEVERS;

EID: 84885484030     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.10.081     Document Type: Article

References (32)

1. K.M. Goeders, J.S. Colton, L.A. Bottomley, Microcantilevers: sensing chemical interactions via mechanical motion, Chemical Reviews 108 (2008) 522-542. (Pubitemid 351344448)
2. A. Boisen, S. Dohn, S.S. Keller, S. Schmid, M. Tenje, Cantilever-like micromechanical sensors, Reports on Progress in Physics 74 (2011) 1-31.
3. X. Li, D.W. Lee, Integrated microcantilevers for high-resolution sensing and probing, Measurement Science and Technology 23 (2012) 40, 022001.
4. M. Sepaniak, P. Datskos, N. Lavrik, C. Tipple, Microcantilevertransducers: a new approach in sensor technology, Analytical Chemistry 74 (2002) 568-575.
5. D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, H. Baltes, Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds, Analytical Chemistry 74 (2002) 3084-3095. (Pubitemid 34755221)
6. Y. Dong, W. Gao, Q. Zhou, Y. Zheng, Z. You, Characterization of the gas sensors based on polymer-coated resonant microcantilevers for the detection of volatile organic compounds, AnalyticaChimica Acta 671 (2010) 85-91.
7. M.A. Urbitzondo, I. Pellejero, M. Villarroya, J. Sese, M.P. Pina, I. Dufour, J. Santamaria, Zeolite-modified cantilevers for the sensing of nitrotoluene vapors, Sensors and Actuators B 137 (2009) 608-616.
8. M.A. Urbitzondo, A. Peralta, I. Pellejero, J. Sese, M.P. Pina, I. Dufour, J. Santamaria, Detection of organic vapours with Si cantilevers coated with inorganic (zeolites) ororganic (polymer) layers, Sensors and Actuators B 171-172(2012) 822-831.
9. H.P. Lang, M. Hegner, C. Gerber, Cantilever array sensors, Materials Today 8 (2005)30-36. (Pubitemid 40352463)
10. R. Archibald, P. Datskos, G. Devault, V. Lamberti, N. Lavrik, D. Noid, M. Sepaniak, P. Dutta, Independent component analysis of nanomechanical responses of cantilever arrays, Analytica Chimica Acta 584 (2007) 101-105. (Pubitemid 46123175)
11. F. Lochon, I. Dufour, D. Rebière, An alternative solution to improve sensitivity of resonant microcantilever chemical sensors: comparison between using highorder modes and reducing dimensions, Sensors and Actuators B 108 (2005) 979-985. (Pubitemid 40743803)
12. D. Maraldo, R. Mutharasan, Mass-change sensitivity of high-order mode of piezoelectric-excited millimeter-sized cantilever (PEMC) sensors: theory and experiments, Sensors and Actuators B 143 (2010) 731-739.
13. L.A. Beardslee, K.S. Demirci, Y. Luzinova, B. Mizaikoff, S.M. Heinrich, F. Josse, O. Brand, Liquid-phase chemical sensing using lateral mode resonant cantilevers, Analytical Chemistry 82 (2010) 7542-7549.
14. L.A. Beardslee, F. Josse, S.M. Heinrich, I. Dufour, O. Brand, Geometrical considerations forthe design of liquid-phase biochemical sensors using a cantilever's fundamental in-plane mode, Sensors and Actuators B 164 (2012) 7-14.
15. M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, J.L SanchezRojas, Selective modal excitation in coupled piezoelectric microcantilevers, Microsystem Technologies 18 (2012) 917-924.
16. V. Ruiz, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J.L. Sanchez-Rojas, Modelling and characterization of AlN-actuated microcantilevers vibrating in the first in-plane mode, Microsystem Technologies 18 (2012) 997-1001.
17. C.P. Green, J.E. Sader, Torsional frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope, Journal of Applied Physics 92 (2002) 6262.
18. T. Cai, F. Josse, S.M. Heinrich, O. Brand, N. Nigro, I. Dufour, Resonant characteristics of rectangular microcantilevers vibrating torsionally in viscous liquid media, in: IEEE International Frequency Control Symposium, Baltimore, Maryland, USA, 21-24 May 2012, 2012.
19. J.L Fu, F. Ayazi, Dual-mode piezo-on-silicon resonant temperature and humidity sensor for portable air quality monitoring systems, in: IEEE Sensors Conference, Waikoloa, Big Island, Hawaii, 2010, 2010, pp. 2131-2135.
20. V. Ruiz, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, E. Vikhagen, J.L Sánchez-Rojas, Optical and electrical characterization of in-plane modes of AlN-based piezoelectric vibrating MEMS, in: 23rd Micromechanics and Microsystems Europe Workshop, Ilmenau, Germany, September 9-12, 2012.
21. C. Lucat, P. Ginet, C. Castille, H. Debéda, F. Ménil, Microsystems elements based on free-standing thick-films made with a new sacrificial layer process, Microelectronics Reliability 48 (2008) 872-875.
22. R. Lakhmi, H. Debéda, M. Maglione, I. Dufour, C. Lucat, Study of screen-printed PZT cantilevers both self-actuated and self-read-out, International Journal of Applied Ceramic Technology 1-10 (2012), http://dx.doi. org/10.1111/ijac.12006, in press.
23. L. Fadel, F. Lochon, I. Dufour, O. Français, Chemical sensing: millimeter size resonant microcantilever performance, Journal of Micromechanics and Microengineering 14 (2004)S23-S30.
24. J. Amirola, A. Rodríguez, L Castañer, J.P. Santos, J. Gutiérrez, M.C. Horrillo, Micromachined silicon microcantilevers for gas sensing applications with capacitive read-out, Sensors and Actuators B 246-253 (2005) 111-112.
25. T.A. Betts, CA. Tipple, M.J. Sepaniak, Selectivity of chemical sensors based on microcantilevers coated with thin polymer films, Analytical Chimica Acta 422 (2000)89-99.
26. P. Kurzawski, C. Hagleitner, A. Hierlemann, Detection and discrimination capabilities of a multitransducer single-chip gas sensor system, Analytical Chemistry 78 (2006) 6910-6920. (Pubitemid 44522543)
27. R.D. Blevins, Formulas for Natural Frequency and Mode Shape, Van Nostrand Reinhold, New York, 1979.
28. I. Dufour, F. Lochon, S. Heinrich, F. Josse, D. Rebière, Effect of coating viscoelasticity on quality factor and limit of detection of microcantilever chemical sensors, IEEE Sensors Journal 7 (2007) 230-236.
29. J.D. Ferry, Viscoelastic Properties of Polymers, Wiley, New York, 1961.
30. J. Zhou, P. Li, S. Zhang, Y. Huang, P. Yang, M. Bao, G. Ruan, Self excited piezoelectric microcantilever for gas detection, Microelectronic Engineering 69 (2003) 37-46.
31. R. Vázquez, R. Lakhmi, H. Debéda, F.J. Arregui, CR. Zamarreño, M. Delgado, C Lucat, E. Llobet, Functionalized screen-printed PZT cantilevers for room temperature benzene detection, Procedia Engineering 25 (2011) 1077-1080.
32. C Castille, I. Dufour, C Lucat, Longitudinal vibration mode of piezoelectric thick-film cantilever-based sensors in liquid media, Applied Physics Letters 96 (2010), 154102.