Experimental investigation into the effect of substrate clamping on the piezoelectric behaviour of thick-film PZT elements

Journal of Physics D: Applied Physics

Volumn 37, Issue 7, 2004, Pages 1074-1078

  Torah, R N ^a   Beeby, S P ^a   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIVES; ALUMINA; CERAMIC MATERIALS; ETCHING; HIGH TEMPERATURE EFFECTS; PIEZOELECTRICITY; SUBSTRATES; THICK FILMS; THICKNESS MEASUREMENT;

CLAMPING EFFECTS; MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS); ZIRCONATE TITANATE (PZT);

ZIRCONIUM COMPOUNDS;

EID: 2342427265     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/7/019     Document Type: Article

References (13)

1. Morgan Electroceramics Ltd Piezoelectric Ceramics Data Book for Designers
2. Baudry H 1987 Screen-printing piezoelectric devices 6th European Microelec. Conf. Proc. pp 456-63
3. Pertsev N A, Zembilgotov A G and Tagentsev A K 1998 Effect of mechanical boundary conditions on phase diagrams of epitaxial ferroelectric thin films Phys. Rev. Lett. 80 1988-91
4. 3 thin films J. Appl. Phys. 85 8023-31
5. Lefki K and Dormans G J M 1994 Measurement of piezoelectric coefficients of ferroelectric thin films J. Appl. Phys. 76 1764-7
6. Nemirovsky Y, Nemirovsky A, Muralt P and Setter N 1996 Design of a novel thin-film piezoelectric accelerometer Sensors Actuators A 56 239-49
7. 3 thin films Sensors Actuators A 77 106-12
8. Jaffe B and Cook W R 1971 Piezoelectric Ceramics (New York: Academic)
9. Efunda Engineering Fundamentals, http://www.efunda.com
10. Hybrid Laser Tech Ltd, http://www.hlt.co.uk/
11. 3 thin film Phys. Rev. B 54 14337-40
12. Arlt G, Hennings D and de With G 1985 Dielectric properties of fine-grained barium titanate ceramics J. Appl. Phys. 58 1619-25
13. Torah R N, Beeby S P and White N M 2003 A study of powder size combinations for improving piezoelectric properties of PZT thick-film devices Eurosensors 27th Portugal 2003 Conf. Proc. pp 360-1