Advantages of PZT thick film for MEMS sensors

Sensors and Actuators, A: Physical

Volumn 163, Issue 1, 2010, Pages 9-14

  Hindrichsen, C G ^a   Lou Moller R ^b   Hansen, K ^c   Thomsen, E V ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b InSensor AS   (Denmark)

^c Ferroperm Piezoceramics A/S   (Denmark)

Author keywords

Figure of merit; MEMS; Piezoelectric; PZT thick film; Screen printing; Sensors

Indexed keywords

ALN; ANALYTICAL MODELING; CHARGE SENSITIVITY; COLD ISOSTATIC PRESSURE; ELECTRICAL DOMAINS; FIGURE OF MERIT; FIGURES OF MERITS; MEMS APPLICATIONS; MEMS SENSORS; MEMSDEVICES; PIEZOELECTRIC; PREPARATION PROCESS; PZT; PZT THICK FILMS; PZT THIN FILM; THIN AND THICK FILMS; VOLTAGE SENSITIVITY; ZNO;

FILM PREPARATION; FILM THICKNESS; MEMS; NANOCANTILEVERS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; PRINTING PRESSES; SCREEN PRINTING; SENSORS; THICK FILMS; THIN FILMS; VAPOR DEPOSITION; ZINC OXIDE;

PIEZOELECTRIC MATERIALS;

EID: 77957679583     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.05.004     Document Type: Article

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