Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

Journal of Electroceramics

Volumn 17, Issue 2-4, 2006, Pages 565-572

  Park, Jae Hong ^a,b   Kwon, Tae Yun ^a,c   Kim, Hyung Joon ^a   Kim, Seung Rae ^a   Yoon, Dae Sung ^a   Cheon, Chae Il ^d   Kim, Hwan ^b   Kim, Tae Song ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b Seoul National University   (South Korea)

^c Yonsei University   (South Korea)

^d Hoseo University   (South Korea)

Author keywords

Cantilever; PZT; Resonance; Sensitivity; Thick film

Indexed keywords

INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PIEZOELECTRIC TRANSDUCERS; SENSITIVITY ANALYSIS;

CANTILEVER DEVICES; MASS SENSITIVITY; PZT MICROMECHANICAL THICK FILMS; RESONANCE BEHAVIOR;

THICK FILMS;

EID: 33847252516     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-006-6290-8     Document Type: Conference Paper

References (13)

1. V. Tajan, P. Gonnard, and M. Troccaz, Proc. The third ICIM/ECSSM'96, Lyon, (France, 1996), p. 564.
2. Y-B. Jeon, T.-S. Chung, and K.-S. No, J. Electroceram., 4(1), 195 (2000).
3. S.P. Beeby, A. Blackburn, and N.M. White, J. Micromech. Microeng., 9, 218 (1999).
4. R.N. Torah, S.P. Beeby, and N.M. White, Sens. Actuat. A, 110, 378 (2004).
5. E.P. James, M.J. Tudor, S.P. Beeby, N.R, Harris, P.G. Jones, J.N. Ross, and N.M. White, Sens. Actuat. A, 110, 171 (2004).
6. S. Le Dren, L. Simon, P. Gonnard, M. Troccaz, and A. Nicolas, Mater. Res. Bull., 35, 2037 (2000).
7. S.P. Beeby, A Blackburn, and N.M. White, Mater. Lett., 40, 187 (1999).
8. J.W. Yi, W.Y. Shih, and W.-H. Shih, J. Appl. Phys., 91, 1680 (2002).
9. P. Luginbuhl, G.-A. Racina, P. Lerch, B. Romanowicz, K.G. Brooks, N.F. de Rooij, P. Renaud, and N. Setter, Sens. Actuat. A, 54, 530 (1996).
10. H. Kueppers, T. Leuerer, U. Schnakenberg, W. Mokwa, M. Hoffmann, T. Schneller, U. Boettger, and R. Waser, Sens. Actuat. A, 97-98, 680 (2002).
11. J.H. Lee, T.S. Kim, and K.H. Yoon, Appl. Phys. Lett., 84, 3187 (2004).
12. J.H. Lee, K.H. Yoon, and T.S. Kim, Integr. Ferroelectr., 50, 43 (2002).
13. J. Merhaut, Theory of Electroacoustics (McGraw-Hill, New York, 1981), p. 100.