Force sensors based on screen-printed cantilevers

IEEE Sensors Journal

Volumn 10, Issue 6, 2010, Pages 1133-1137

  Lakhmi, Riadh ^a   Debéda, Hélène ^a   Dufour, Isabelle ^a   Lucat, Claude ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Cantilevers; Ceramic; Force sensor; Piezoresistor; Screen printing

Indexed keywords

CERAMIC SENSORS; FORCE SENSOR; PIEZO-RESISTORS; PIEZORESISTOR; REPRODUCIBILITIES; SACRIFICIAL LAYER; SCREEN-PRINTED; STRAIN GAUGE; STRAIN GAUGE FACTOR; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; GLASS CERAMICS; MATERIALS PROPERTIES; NANOCANTILEVERS; SCREEN PRINTING; STRAIN GAGES;

SENSORS;

EID: 77950816126     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2040387     Document Type: Article

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